Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD

Asset ID: 205083

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Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: TBA

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan City, Taiwan

Available date: Currently Available


Process: PEALDOX


Tool config is based on original PO, please verify tool details at tool inspection


Safety Specification: SEMI S2-0709

Heater Model: None

Process Condition: LP

Process Temperature (C): Room Temp

ART Control: None

N2 Load Lock: Yes

Wafer Type: 300mm-Si SEMI STD-Notch

Qty. of Production Wafers: 100wfr

Boat Operation: 1 Boat Type

Software Version (WAVES): Ver. 6.08

Seismic Isolation Configuration: None

Dewpoint Meter for N2 LL: None

Loading Area Light: White (LED)

RCU Duct Length FNC - RCU: N/A

Ionizer (maker/model): None

Chemical PreFilter-Acid: None

Chemical PreFilter-Alkali: None

Chemical PreFilter-Hydrocarb: Yes

Chemical PreFilter-Location: Side FFU

Side Maintenance: None

O2 Density Control for N2 LL: Yes

"O2 ANALYZER: Maker: NGK, Model: SH-304 STANDARD 

(New CIP item: Remove O2 detector and FIMS sampling function)"

N2 Boat Shower Wafer Cooling: None

Furnace Temperature Controller: None

Carrier Type: FOUP/25slots, SEMI STD

FOUP Maker/Model: Entegris/A300

Carrier Stage Capacity: 18 FOUP

Info Pad A,B: Pin

Info Pad C,D: Pin

Fork Material: Al2O3+PEEK

W/T Type: 1+4 Edge Grip

W/T Type A/T: Yes

Furnace Exhaust Connection Point: Top Connection

Cooling Water Connection Point: None

RCU DUCT Connection Point: N/A

IGS Type: IGS 1.125"W-seal rail-mount

IGS Maker: Fujikin

Tubing Bends: Bend(Less than 90deg.)

IGS Final Filter: Entegris

IGS Regulator: CKD

IGS MFC (Maker/Type): HORIBA STEC/Digital

Water Vapor Generator(WVG): N/A

IGS Press. Transducer: Nagano

Liquid Source Delivery- LTO520: HORIBA STEC / LSC-F550 Series

Auto Refill System- LTO520: IMI: Schumacher CGII-300T 

Auto Refill System Provider: Provided by customer

Refill System Tubing interconn: Provided by customer

Ozone Delivery System: None

Ozone Delivery System Provider: N/A

Incoming Gas Connection Point: Bottom Connection

Exhaust VENT Connection Point: Bottom Connection

Gas Unit Exh Connection Point: Bottom Connection

Vacuum Gage - Press Ctrl: MKS (Hot) Capacitance Manometer

Vacuum Gage - Press Monitor (133kPa): MKS (Hot) Capacitance Manometer

Vacuum Gage - Pump Monitor: MKS (Hot) Capacitance Manometer

Main Valve: CKD-VEC

Pump Maker/Model: Edward 3030T

Pump Provided by: Provided by customer

Abatement System Type: Burning Type

Abatement System (Maker/Model): EBARA / VIPS

Abatement System Provider: Customer

N2 Dilution Unit Provided by: No NDU

Pump Power: Customer's Facility Provided

Pump Control Unit Setting Location: None

Pump-FNC Vacuum Piping Provide: Customer's Facility Provided

Exhaust Pressure Control (AP): N/A

Exhaust Pressure Controller (AP): N/A

Vacuum Exhaust System: 3inch Pipe

Trap: None

Vacuum Pressure Controller: CKD-VEC

Burn Out Unit: None

Condenser: N/A

Quartz Material Requirement: Electric Fused

Quartz Provided by: Costumer

Quartz Vendor Requirement: None

SiC Provided by: N/A

SiC Vendor Requirement: N/A

Process tube: Quartz IRad Tube

Inner T/C: None

Tube Sealing: The sealing material for CAP is Q-ring(DU353)

Soft Backfill Injector: None

Boat Type: 117 slots Ladder (8mm pitch)

Boat Material: Quartz

Boat Rotation: Yes

Pedestal Type: Quartz

Cap Heater: None

Auto Shutter: Shutter Purge Type

Earthquake Countermeasure: Yes

Voltage 3phase: 208VAC

3phase connection type: Star Connection

Voltage Single-phase: None

Single-phase connection type: N/A

Frequency: 60Hz

Wattmeter: None

RF Power Unit / Max Rating Power: 0.5kW (Max)

RF Power Unit / Max Operable Power: 0.5kW (Max)

RF Power Unit / Frequency: 13.56MHz

Control Power UPS provided by: Customer

Control Power UPS type: Fab-wide system

UPS Input/Output Voltage: N/A

Power Cable Input Entrance Loc: Furnace Unit Bottom

FNC - Pump: 30m

FNC -Refill System : 30m

FNC - UPS (if used): N/A

Wiring by: Customer

Conduit/Raceways provided by: Customer

Host Communications: Comply with GJG

Equipment Host I/F Connection: Gas Box TOP HSMS (10Base-T/100Base-TX)

Ingenio: Yes

Group Controller Connection: Yes

OHT Capability: Yes

AGV Capability: None

RGV Capability: None

PGV Capability: None

Load Port Operation: Upper

PIO I/F Location: FNC Top

PIO Provided by: TEL

PIO Maker/Model: Hokuyo / DMS-HB1-Z

Carrier ID Reader Writer Type: RF

CIDRW Lower Load Port: Read

CIDRW Upper Load Port: Read

CIDRW FIMS: Read/Write

CIDRW Maker/Model: Maker:Omron amp unit: V640-HAM11-V3, CID RW Controller: V700-L22

CIDRW Provided by: TEL

EEC (Equipment Engineering Capability): None

"Customized Management Signals: (PT/WATER and blow two item will be added)

1.Valve voltage of MFC is output to Waves and Ingenio

 The object of MFC:NX,NY,N1,N2,N3,N4,O1,XF1,NXF1,GG1

2.The differential pressure of N2 L/L will be asked to get SVID and show in waves."

"Signal Tower Model: Front operation panel top:LOUGWB-24-3 LOUGWB-24-4

Gas box rear:LOULWB-24-3 "

Signal Tower Colors: Red/Blue/Yellow/Green

Signal Tower Location: Front 

Front Operation Panel: Yes

MMI and Gas FlowChart: Gas Box & Front Operation Panel Installed

Indicator Type: TEL provided new indicator type

Operator Switch: Operator Access/White Cover with Orange Light

Pressure Display Unit: MPa/Torr 

Cabinet Exh Pressure Display: Pa

Warning Label: Traditional Chinese/English (English will be first priority where can stick only label)

Furnace (Exh/Box,Gas/Box inclu: Main-Fab

Power Box: N/A

Pump: Sub-Fab

RCU: N/A

Step Up Transformer: N/A

Step Down Transformer: N/A

Ozone Delivery System: N/A

WVG Controller: N/A

Auto-Refill System: Sub-Fab

UPS: None

Gas Leak Detector: YES

Gas Leak Detector Provided By: TEL

Gas Leak Detector Maker: Optional Riken

Gas Detector Power: Tool provided

Detected Gas 1 / Location: HF/Gas box

Detected Gas 2 / Location: LTO520/Gas box

Detected Gas 3 / Location: LTO520/Scavenger exhaust

Detected Gas 4 / Location: N/A

Detected Gas 5 / Location: N/A

Detected Gas 6 / Location: N/A

Detected Gas 7 / Location: N/A

Furnace Detection Port: 2 points (1 pair)

Gas Box Detection Port: 4 points (2 pairs)


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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