Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) TELFORMULA Nitride

Asset ID: 198929

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELFORMULA Nitride

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2004/2

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 2/11/2022

Tool is operating in clean room.

-Equipment is located in Micron’s

cleanroom and buyer is responsible for deinstallation,

packaging, crating, loading and

shipping. or

-Equipment is located in Micron’s

cleanroom and is schedule for deinstallation

by [VENDOR NAME]. 

-Buyer is responsible for

$X,XXX.XX in de-installation costs payable to Micron. Buyer is

also responsible for packaging,

crating, loading and shipping.

 

A HARD

DISK DRIVE WILL BE REMOVED FORM TOOL.

 

Tube

Material:Quartz

Boat

Material:Quartz

Production

wafes:50

Pressure

control:APC Valve

Process

Gas:DCS(F.S:200sccm),NH3(F.S:2slm),HF(F.S:5slm),20%F2/N2(F.S:20slm),N2

MFC

Maker:STEC

MFC

Model:F700series

Process

Temp:600-700deg

Pump

Maker:EDWARDS

Pump

Type:iH1800

 

Missing

or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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