Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) ALPHA-303i Anneal

Asset ID: 19621

Print spec sheet

Tokyo Electron Ltd. (TEL)

ALPHA-303i Anneal

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: May, 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool is operating in clean room.

Shipping brackets and kits will need to be supplied by the buyer.

Buyer is responsible for arranging disassembly and rigging for tool.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


Tube Material:Quartz

Boat Material:SIC

Production wafes:50

Process Gas:Ar(F.S:30slm),O2(F.S:30slm),N2(F.S:30slm),DCE(F.S:1slm)

Water generating Type:External Torch

MFC Maker:STEC

MFC Model:Z500series

Process Temp:700-1100deg



Missing or damaged parts: Not reported. Inspection is recommended to confirm.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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