Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) TELFORMULA ALD High-K

Asset ID: 18422

Print spec sheet

Tokyo Electron Ltd. (TEL)

TELFORMULA ALD High-K

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2015

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


2.2- General Specification

Safety Specification - S2-0703 - PartQty1

Heater Model - Mid-Temp. VCM-50-012L - PartQty1

Maximum Operating Temperature (C) - 300 - PartQty1

ART Control - Yes - PartQty1"

N2 Load Lock - Yes - PartQty1"

Wafer Type - 300mm-Si SEMI STD-Notch - PartQty1"

Qty. of Production Wafers - 50 - PartQty1"

Software Version (WAVES) - Ver.2.12 R006 - PartQty1"


3.1.1- Furnace Spec, Furnace

Loading Area Light - White (LED) - PartQty1"


3.1.2- Furnace Spec, Wafer/Carrier Handling

Carrier Type - FOUP/25slots, SEMI STD - PartQty1"

FOUP Maker/Model - Entegris / A300 - PartQty1"

Carrier Stage Capacity - 10 - PartQty1"

Fork Material - Al2O3


3.1.3- Furnace Spec, Furnace Facilities

Furnace Exhaust Connection Point - Top Connection - PartQty1"

Cooling Water Connection Point - Bottom Connection - PartQty1"

Air Intake Point - Top - PartQty1"


3.2.1- Gas Spec, Gas Distribution System

IGS Type - IGS 1.5""W-Seal rail-mount - PartQty1"

IGS Maker - Fujikin - PartQty1"

Tubing Bends - Bend (Less than 90deg) - PartQty1"

IGS Final Filter - N2 50L line:Entegris(Ni),

The other N2 line and Process gas line:PALL(SUS) - PartQty1"

IGS Regulator - CKD - PartQty1"

IGS MFC (Maker/Type) - HORIBA STEC / Digital - PartQty1"

IGS MFC for low flow N2 purge when cleaning - HORIBA STEC / SEC-G111 - PartQty1"

IGS Press. Transducer - Nagano - PartQty1"

Liquid Source Vapor System Maker / Model - For TMA HORIBA STEC / LSC-F530

For ZAC(OCTANE) STEC / TL-2013 - PartQty1"

Auto-Refill System- TMA - Air Liquid / CANDI - PartQty1 - Model : CALEN - Japan Air Gases"

Auto Refill System- ZAC - Air Liquid / CANDI - PartQty1 - Model : AQUARIUS - Japan Air Gases"

Ozone Delivery System - Toshiba Mitsubishi / OP-500H-RE1 - PartQty1"


3.2.2- Gas Spec, Gas Facilities

Incoming Gas Connection Point - Bottom Connection - PartQty1"

Gas VENT Connection Point - Bottom Connection - PartQty1"

Exhaust VENT Connection Point - Bottom Connection - PartQty1"

Gas Unit Exh Connection Point - Bottom Connection - PartQty1"


3.3.1- Exhaust Specification button

Vacuum Gage - Press Ctrl - MKS (Hot) Capacitance Manometer - PartQty1"

Vacuum Gage - Press Monitor (133kPa) - MKS (Hot) Capacitance Manometer - PartQty1"

Vacuum Gage - Pump Monitor - MKS (Hot) Capacitance Manometer - PartQty1"

Main Valve - CKD-VEC 3"" - PartQty1"

Pump Maker/Model - EDWARDS / iXH1820 - PartQty1"

Abatement System Type - Burning Type - PartQty1"

Abatement System (Maker/Model) - EDWARDS / Atlas-TPU2 - PartQty1"


3.3.1- Exhaust Specification

Exhaust Box - Wide Type (1200mmW) - PartQty1

Cap Type - Quartz - PartQty1"

Cap Heater - Yes - PartQty1"

Switch Valve for Cap Cooling Water - None - PartQty1"

Cooling Water for Cap Rotation - Yes - PartQty1"

Heat Shield Type - HS Plate - PartQty1"


3.5.1- Power Specification, Power dist System

Voltage 3phase - 480VAC - 200VAC is Ozonizer power - PartQty1"

3phase connection type - Star Connection - PartQty1"



3.5.2- Power Specification, Cable Length

Power Cable Input Entrance Loc - Power Box Top

FNC - Power Box - 30m

FNC - RCU - 30m

Power Box - Pump Unit - 30m

Power Box - Refill System - 30m


Power Box - Ozonizer - 20m - PartQty1"

Ozonizer control rack - Ozonizer - 20m - PartQty1"

Ozonizer control rack - Power Box - 20m - PartQty1"

Ozonizer conrol rack - RCU - 20m - PartQty1"

Ozonizer control rack - Floor Box - 20m - PartQty1"


3.6.1- Interface Specification, Factory Automation System

Host Communications - Comply with GJG - PartQty1"

Equipment Host I/F Connection - Power Box Top HSMS (10Base-T/100Base

Ingenio - Yes

OHT Capability - Yes - PartQty1"

AGV Capability - None - PartQty1"


Load Port Operation - Lower + Upper - PartQty1"

PIO I/F Location - FNC Top - PartQty1"


3.6.1- Interface Specification, Factory


Carrier ID Reader Writer Type - RF - PartQty1"

CIDRW Lower L/P - Read - PartQty1"

CIDRW Upper L/P - Read - PartQty1"

CIDRW FIMS - Read/Write - PartQty1"


Customized Management Signals - PT / WATER - PartQty0"


3.6.2- Interface Specification, User Interface

Signal Tower Model - LCE Series - PartQty1"

Signal Tower Colors - RED / BLUE / YELLOW GREEN

Signal Tower Location - Front for 10 Stocker (Left) - PartQty1"

Front Operation Panel - Yes - PartQty1"

MMI and Gas FlowChart - Gas Box & Front Operation Panel Installed - PartQty1"

Light Curtain - None - PartQty1"

Indicator Type - Selete - PartQty1"

Operator Switch - Operator Access / White Cover with Orange Light - PartQty1"

Pressure Display Unit - MPa / Torr - PartQty1"

Cabinet Exh Pressure Display - Pa - PartQty1"



3.7.1- Other Specification, Unit Location

Furnace (Exh/Box,Gas/Box inclu - Main-Fab - PartQty1"

Power Box - Sub-Fab - PartQty1"

Pump - Sub-Fab - PartQty1"

Ozone Delivery System - Sub-Fab - PartQty1"

Auto-Refill System - Sub-Fab - PartQty1"


3.7.2 - Other Specification, Gas Leak Detector

Gas Leak Detector - YES - PartQty1"

G

Gas Leak Detector Maker - Maker: Riken

Use gas/Detector type: O3 / GD-K77D-A O3 ZAC / GD-K7D-A (C2H5)2NH OCTANE

GD-K77D-A OCTAN

Detected Gas 1 / Location - Detected Gas 1 / Location - Gas box - PartQty1"

Detected Gas 2 / Location - Detected Gas 2 / Location - Gas box - PartQty1"

Detected Gas 3 / Location - Detected Gas 3 / Location - N/A - PartQty0"

Detected Gas 4 / Location - Detected Gas 4 / Location - Gas box - PartQty1"

Detected Gas 5 / Location - Detected Gas 5 / Location - N/A - PartQty0"

Detected Gas 6 / Location - Detected Gas 6 / Location - N/A - PartQty0"

Detected Gas 7 / Location - Detected Gas 7 / Location - N/A - PartQty0"

Gas Box Detection Port - 8 point (4pairs) - OPT: Ordering Fab must verify Port number,

8 Port (4 Pair) = 1, 10 Port (5 Pair ) = 2



7.0- Attached List

Facility List - Rev.1 - PartQty1"

System layout drawing - 3892-128274-11 - PartQty1 - 3892-128274011"

Electrical System Diagram - Design in progress - PartQty1 - 3892-128213-11"

Cooling Water System Diagram - Design in progress - PartQty1 - 3893-C20822-13"

Conducting (Wire-Way) Work Among Boxes - Design in progress - PartQty1"

Gas System Diagram - 3892-226546-11 - GFC - PartQty1 - 3892-226398-11"

Gas Parts List - 3898-B22513-12 - GPL - PartQty1 - 3898-B22513-12"

Valve Interlock - Design in progress - PartQty1"

Safety Interlock - Rev.1 - PartQty1"

External Input / Output Table - Rev.1 - PartQty1"

Signal Tower Special Sequence - Rev.1 - PartQty1"

Quartzware List - Rev.1 - PartQty1"



Missing/Damaged Parts List

None report, please inspect tool to reconfirm

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