Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) TELINDY Plus ALD HighK

Asset ID: 17755

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Tokyo Electron Ltd. (TEL)

TELINDY Plus ALD HighK

Vertical Furnace

Furnaces/Diffusion Systems

Equipment details:

Date of Manufacture: 2009

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: 12/17/2022

Tool Status:  In production.

Configuration.  Audit to verify.

Vertical MLD ALO/ZrO Furnace
TELINDY-PLUS for 300mm Wafers
I. Base Unit for ALO/ZrO Process       
 a. Cabinets / units / Controllers
b. FOUP and Wafer Handling Automation
    (18 FOUP Stocker)
c. Low Temp Heater : VMM-56-201
d. Integrated Gas System for ALO/ZrO
    - TEL Bubbler unit for Zr Precursor
    - Heater Jacket Unit for TEMAZ line
    - Vaporizer unit for TMA Precursor
    - Ozinizer Interface box
    - Purge N2
-
e. Vacuum Foreline Configuration
    including High Speed VEC
f. US Safety
-
II Per System Options
a. N2 Load Lock System
b. Dual Boat operation
c. Chemical Filter
V. Ozonizer Unit (OP-500H-RM2)           
 
Modified in 2011
 
1. Modification ALHFO to MDZRO  
Applicable tool: TELINDY S00000945026
-
- Add AS102 (3DMAS)
- Add Bubbler (TMA)
- Add 3rd Gas box
- Replace manifold
- Change O3 Gen from TMEIC to MKS
- Replace entire final valve box
- Replace all delivery lines
- GFC Panel Upgrade
 

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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