Macquarie Equipment Trading on behalf of Micron Technology, Inc. (VA)
Date of Manufacture: 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Manassas, United States
Available date: Currently Available
Tool Status: Deinstalled and moved to the warehouse.
Configuration. Audit to verify.
Zestone Model DJ-1223V (Z-3CN), 300mm Reactor, Dual Boat, One Reactor Configuration for TEOS system.
Base System Includes:
UPS (AC 120V)
SEMI S2-0200E Compliance
Options: RHC Upgrade/1 Tubes (Rapid Heating Canister) Best 30degC UP/ 20degC Down
Rear Operation Panel
Hard Gas Pattern Panel (2 pcs)
HPM (Toxic Gas) Interlock
POD ID Reader including software
Keyence POD ID Price Delta (compared to Asyst)
OHT Interface, 2 pcs; Serial parameter change, 2 pcs; Cable
Plasma Trap Configuration
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