Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: July, 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is stored in an off-site warehouse.
Shipping brackets and kits will need to be supplied by buyer.
Missing or damaged parts: No Missing or damaged parts reported by Fab15.
Tube Material:Quartz
Boat Material:Quartz
Production wafes:50
Pressure control:APC Valve
Process Gas:TEMAZ(F.S:1.0sccm),TMA(F.S:300sccm),O3(F.S:20slm,200g/m3),N2,OCTANE
Vaporizer Maker:STEC(TMA,TEMAZ)
Vaporizer TYPE:LSC-F530(TMA),TL-2011(TEMAZ)
MFC Maker:STEC
MFC Model:Z500series
Process Temp:200-300deg
Ozonizer Maker:TMEIC
Ozonaizer Type:OP-250
Pump Maker:EDWARDS
Pump Type:iXH1820
Missing or damaged parts: Not reported. Please inspect to confirm.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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