Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Ebara FREX300S Tungsten

Asset ID: 210331

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2005.8

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 9/23/2022

Fab15 confirmed there were no missing or damaged parts.



OEM  EBARA
Tool Model  F-REX300S
Process  W
Software Version (include revision #) 8.1
System Power Rating  AC200V 60Hz 3phase for System
Loading Configuration  3 load port
RowParent CompntPart DescriptionDetailed DescriptionQtyMfg Part
1Base SystemFrex 300S4 head 4 platenpolishing system. Dry in Dry out1 
2Nova 3090 ReadyInsitu Metrology System0 
3Monitor 1 LocationFront of tool1 
4Monitor 2 LocationCleaner Side of tool1 
5Monitor 3 LocationCart Mounted on Polishing Side of tool1 
6Front Light Tower locationLeft Side1 
7Rear Light Tower locationRight Side1 
8SoftwareHMIHuman / Machine Interface1Version 8.10
9Endpoint Simulation SoftwareME-2012.3.50.1
10Simulator Software KeyOne Key supplied1 
11NOVA Interface softwareVia File Server0 
12Factory InterfaceWIP Delivery TypeOHT or manual delivery1 
13CarrierShinetsu Foup300E(S206) 1 
14E84 PI O Sensors and CablesUPPER E84 Sensors & Cables, with E87 compliance1 
15E99 Carrier IDSemi ver 0101041 
16Docked E99 Reading CapabilityFOUP Reader1 
17Frame ConfigurationMetro ready right side of mini-environment0 
18Load Port TypesISO PORTASYST3 
19Load Port Operator InterfaceStandard1 
20Operator Access SwitchYes1 
21Platen APlaten TypeCeramic (SiC), 10-150 RPM1 
22Platen PadFor shipment only1 
23Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
24Platen End pointRECM & Friction1 
25Platen Insitu metrologyInsitu metrology0 
26Slurry DeliveryInjecter + HIC1 
27Line 150-500ml/min1 
28Line 250-500ml/min1 
29Dresser DIW flow meter.Flow meter1 
30Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
31Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
32Platen BPlaten TypeCeramic (SiC), 10-150 RPM1 
33Platen PadFor shipment only1 
34Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
35Platen End pointRECM & Friction0 
36Platen Insitu metrologyInsitu metrology0 
37Slurry DeliveryInjecter + HIC1 
38Line 150-500ml/min1 
39Line 250-500ml/min1 
40Dresser DIW flow meter.Flow meter1 
41Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
42Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
43Platen CPlaten TypeCeramic (SiC), 10-150 RPM1 
44Platen PadFor shipment only1 
45Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
46Platen End pointRECM & Friction1 
47Platen Insitu metrologyInsitu metrology0 
48Slurry DeliveryInjecter + HIC1 
49Line 150-500ml/min1 
50Line 250-500ml/min1 
51Dresser DIW flow meter.Flow meter with user configurable alarm settings.1 
52Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
53Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
54Platen DPlaten TypeCeramic (SiC), 10-150 RPM1 
55Platen PadFor shipment only1 
56Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
57Platen End pointRECM & Friction0 
58Platen Insitu metrologyInsitu metrology0 
59Slurry DeliveryInjecter + HIC1 
60Line 150-500ml/min1 
61Line 250-500ml/min1 
62Dresser DIW flow meter.Flow meter1 
63Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
64Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
65PolisherPolisher TechnologySlurry and Pad1 
66Polishing Head300mm AI Head Generation 21 
67Pad Wafer Loss SensorLaser type1 
68Atomizer/Spray BarEbara to provide bracket and atomizer bar.1 
69AI head flanges pinsSolid pin1 
70Cleaner ModuleSpecial ChemicalSingle chemical bulk line that will service all modules.1 
71Cleaner Module 1Roll Roll Cleaner TypeRoll Brush1 
72Chemical 1 Upper Control ValveRecipe settable flow1 
73Chemical 1 Lower Control ValveRecipe settable flow1 
74Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
75Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
76Special Chemical UpperNeedle valve1 
77Special Chemical LowerNeedle valve1 
78Special Chemical UpperFlow Meter with user configurable alarm settings.1 
79Special Chemical LowerFlow Meter with user configurable alarm settings.1 
80MegasonicNozzle1 
81Bevel Edge CleaningNo0 
82Cleaner Module 2Roll Roll Cleaner TypeRoll Brush1 
83Chemical 1 Upper Control ValveRecipe settable flow1 
84Chemical 1 Lower Control ValveRecipe settable flow1 
85Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
86Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
87Special Chemical UpperNeedle valve1 
88Special Chemical LowerNeedle valve1 
89Special Chemical UpperFlow Meter with user configurable alarm settings.1 
90Special Chemical LowerFlow Meter with user configurable alarm settings.1 
91MegasonicNo0 
92Bevel Edge CleaningNo0 
93Cleaner Module 3Cleaner TypeRoll Brush1 
94Chemical 1 Upper Control ValveRecipe settable flow1 
95Chemical 1 Lower Control ValveRecipe settable flow1 
96Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
97Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
98Special Chemical UpperNeedle valve1 
99Special Chemical LowerNeedle valve1 
100Special Chemical UpperFlow Meter with user configurable alarm settings.1 
101Special Chemical LowerFlow Meter with user configurable alarm settings.1 
102MegasonicNo0 
103Bevel Edge CleaningNo0 
104SRDSpin Rinse DryerYes1 
105Safety PrecautionsFM4910 Compliant> 97% by weight FM 4910 approved materials of construction.1 
106EPOTwist to release1 
107Safety labelsEnglish1 
108Secondary ContainmentAll mechanical connections1 
109FacilitiesInstallation TypeNot through the wall0 
110Seismic supportSeismic support points listed1 
111Chemical ConnectionBottom1 
112Exhaust ConnectionTop1 
113Gas ConnectionBottom1 
114Drain ConnectionBottom1 
115Bulk Supply RegulationPont of use regulation for special chemical supply line.1 
116External PenetrationsBulkhead fitting for inert gas1 
117External PenetrationsDual containment for liquids1 
118MetrologyNova Interface requirementsFunctional interface in include wafer transfer and data exportation to buyer host0 
119DocumentationOperations ManualsCD ROM0 
120Maintenance ManualsCD ROM0 
121Electrical DiagramsCD ROM0 
122Plumbing DiagramsCD ROM0 
123OEM parts manualsCD ROM0 
124DocumentationLaserRequired class II documentation1 
125Additional OptionsMetal Contact CountermeasuresAppropriate covers to reduce possibility of enviromental contamination1 


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