Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
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Dainippon Screen Mfg. Co. (DNS)
Date of Manufacture: APR 2015
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Missing or damaged parts: Fab15 confirmed there are no missing or damaged parts.
Tool's footprint is 2150mm x 5805mm. Also, Maintenance space 1000mm is required around the tool
|Software Version (include revision #)||V2.642STD00|
|System Power Rating||208AC 3-phase×2|
|Loading Configuration||4 load ports|
|Vendor Chm Model||Chemicals / Gases Used (not to use Micron Proprietary names)|
|Chm/Unit Position 1||MPC1__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 2||MPC2__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 3||MPC3__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 4||MPC4__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 5||MPC5__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 6||MPC6__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 7||MPC7__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 8||MPC8__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 9||MPC9__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 10||MPC10__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 11||MPC11__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 12||MPC12__________________||_DHF/_CO2Water/IPA__________________________|
|Chm/Unit Position 13||_EC1______________________||_CC2;DHF=1：300（HF：DIW）__________________|
|Chm/Unit Position 14||_EC2______________________||_CC3;DHF=1：300（HF：DIW）__________________|
|Chm/Unit Position ___||_EC3______________________||_CC1;IPA__________________________|
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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