Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: July 2009
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 10/15/2022
Missing parts: No missing parts.
Defective parts: Chamber 2 is defective. For more details, please see configuration.
Tool Model: CELLESTA Plus
Process: Cylinder etch cleaning
Software Version (include revision #): 3.04.237Na
System Power Rating: ・3Φ 200V for CONTLOR EP1
・3Φ 200V for HEATER EP2
・1Φ 200V for EXHAUST SENSOR EP3
Loading Configuration: 4 LP
For more details, please see configuraiton.
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