Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) CLEAN TRACK LITHIUS

Asset ID: 210282

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Tokyo Electron Ltd. (TEL)

CLEAN TRACK LITHIUS

Single Block (Coat/Develop)

Resist Processing Equipment

Equipment details:

Date of Manufacture: 06/06

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/21/2022

OEM  Tokyo Electron Limited
Tool Model  LITHIUS
Process  TEL_LITHIUS_365NM 
Software Version (include revision #) 300.0.21.586
System Power Rating  200V AC 3-Phase
Loading Configuration  5 loaders
 QTY
CSB1
SPIN11
OVEN11
OVEN21
IFBM1
IFBS1
THC1
COT CAB/DEVCAB1
AC POWER BOX1
FIRE EXTINGUISHER1
Safety: 
COT (Line -cleand OK73 shinner)
DEV(Line -cleand DI water) 
COT CAB(Line -cleand OK73 shinner)
DEV CAB(Line -cleand DI water)
Other:
Chemical Filter(accessories)


BLOCK DIAGRAM AVAILABLE: PLEASE CONTACCT YOUR SALES PERSON.

Fab15 confirmed there were no missing or damaged parts.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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