Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
SEM - Critical Dimension (CD) Measurement
Date of Manufacture: 2010
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Standard Equipment
Thermally assisted field emission electron gun
Patented electron optics (including In-Lens & Top detector)
SEM auto focus and auto stigmation module
3x300mm open cassette ports
Standing / Sitting operator console
3D sidewall imaging
Signal Tower
Central Recipe database server (Tower type, for First in Fab)
Application Specification METROLOGY
Repeatability: Lines & CH L-0.2nm CH-0.25nm; Slope Angle STI/DD/Litho 1deg/1deg/1deg; Height STI/DD/Litho 10nm/10nm/17nm
Reproducibility: Lines & CH L-0.2nm CH-0.25nm; Slope Angle STI/DD/Litho 1deg/1deg/1deg; Height STI/DD/Litho 10nm/10nm/17nm
VeritySEM4i: Lines & CH 0.9nm
IMAGING
Image resolution: 1.65nm @ 800,0 V
Side wall imaging: 15 degrees tilt at 4 directions
HAR imaging: 1:30 features
ABW: 10.5nm
Accelerating Voltage: 0.2kV to 2.5kV, Extraction V. up to 4KV
Probe Current: 5pA - 500pA
System Performance
Throughput
5 sites/wafer: Lines/Spaces >80 WPH; Slope/Height 13 WPH
20 sites/wafer: Lines/Spaces >52 WPH
PR Success rate: 99.70%
MTBF: 1000 hours
MTTR: 4 hours
MTBA: 24 hours
Availability: 95%
Footprint Configuration
4x200 & 4x150 OC: w/o Service Area 4.24 sqm; w/ Service Area 7.14 sqm
3x200 SMIF: w/o Service Area 4.61 sqm; w/ Service Area 7.40 sqm
2x300 FOUP: w/o Service Area 5.15 sqm; w/ Service Area 7.48 sqm
3x300 FOUP: w/o Service Area 6.21 sqm; w/ Service Area 8.34 sqm
Wafer Particle Contamination
Front 0.09um particles: 25 PWP/wafer (with mini environment)
Front 0.2um particles: 5 PWP/wafer (with mini environment)
Back 0.2um particles: 3000 PWP/wafer (with mini environment)
Carbonization: 0.05nm per visit
Equipment Parameters
Wafer size: 150mm, 200mm, 300mm
Optical magnification 16x, 220x (FOV: 450mm - 6000mm)
SEM magnifications: 1000x to 400,000x (100mm - 0.25mm)
Stage: 300mm/s with continuous motion trackball
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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