Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Endura II Front-End Metallization

Asset ID: 99622

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Applied Materials (AMAT)

Endura II Front-End Metallization

PVD (Physical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: TBC

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 11/11/2022

Tool is operating in clean room.

Shipping brackets and kits will need to be supplied by buyer.

Missing or damaged parts: a MFC (Ar_200sccm)[ChD]  P/N:3030-13113 and a Stage Motor[ChD]   P/N:P50B07040HCS00M are missing.


[Chamber 1]

For Co PVD chamber,ALPS

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,SICERA KZ-8L3C,SHI

HT ESC type stage

Ar;100/20sccm


[Chamber 2]

For Co PVD chamber,ALPS

DCPS;OPTIMA DCG-200,ENI,for PVD

PUMP/CRYO,SICERA KZ-8L3C,SHI

HT ESC type stage

Ar;100/20sccm


[Chamber 3]

For TiN PVD chamber,RFPVD

DCPS;ODC PWR SUPPLY, 100-5000W, 400VAC, ENI OPTIMA

RFPS;RF GEN,13.56MHZ,5KW,480VAC,DNET

PUMP/CRYO,SICERA KZ-8L3C,SHI

DT ESC MT

Ar;200/20sccm

N2;200sccm


[Chamber 4]

For TiN PVD chamber,RFPVD

DCPS;ODC PWR SUPPLY, 100-5000W, 400VAC, ENI OPTIMA

RFPS;RF GEN,13.56MHZ,5KW,480VAC,DNET

PUMP/CRYO,SICERA KZ-8L3C,SHI

DT ESC MT

Ar;200/20sccm

N2;200sccm


[Chamber D]

For Pre-CLN chamber,PCXT

RFPS;CDX-2000,13.56/2MHz,COMDEL,for BIAS/SLA

PUMP/TMP MAG1300,LEYBOLD.

Ar;200/20sccm


[Chamber E]

For Degas,Plate heater

PUMP/CRYO,SICERA KZ-8L3C,SHI

Ar,press. Controlled


[Chamber F]

For Degas,Plate heater

PUMP/CRYO,SICERA KZ-8L3C,SHI

Ar,press. Controlled

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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