Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
PVD (Physical Vapor Deposition)
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Chamber Position 1 & 3 - Process Type SIP Ti
Chamber Position c & D - Process Type Reactive PC
Chamber Position 2 - EnCoReII Ta
Chamber Position 4 - EnCoReII Cu
Process Type: SIP Ti
Chamber position: 1,3
Shutter option: yes
chamber body (Al or SST): SST
chamber body part number: 0242-33289
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko/Tosoh
Target No.: TAG73
Bakeout/idle power (%): 40
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): AE-Pinnacle
AMAT Part number Master: 0190-34650
OEM Part Number Master: n/a
AMAT Part number Slave: 0190-34650
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : ENI - GHW12Z
AMAT Part number : 0190-25529
OEM Part Number: GHW-12Z-12DF2NH-001
Bias Generator Size: 1250w
Bias Generator Frequency: 13.56 Mhz
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
RF1 power cable P/N (bias): 0190-02031
RF2 power cable P/N (resonator): n/a
RF cable (match bax to PIB): 0190-15905
Magnet rotation speed (rpm): 65
Magnet shim thickness: n/a
Magnet type: SIP
Magnet part number: 0010-11228
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.5mm
adaptor p/n: 0040-82921
Kit spacer upper p/n: 0040-76943
Kit spacer lower p/n: 0040-62877
upper shield p/n: 0020-23549
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
lower shield p/n: 0020-02344
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
inner(or mid) shield p/n: 0020-54777
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield clamp p/n: 0020-08299
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
lower shield clamp p/n: 0020-02348
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
pedestal cover p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
dep ring p/n: 0200-08301
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
cover ring p/n: 0021-17770
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
insulator bushing p/n: 0200-00590
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
Shutter: 0021-25014
Treatment (Arc spray/Bead Blast): Bead Blast
Treatment roughness (RA): na
pedestal type: FDR SLT
pedestal p/n: 0010-22985
heater spacing in mm: no concern
heater spacing in steps: -55050
min heater spacing in mm: no concern
min heater spacing in steps: no concern
max heater spacing in mm: no concern
max heater spacing in steps: no concern
Lift fingers p/n: no concern
Lift hoop p/n: no concern
Cryo restrictor(Y/N): na
Cryo restrictor Part Number: na
Max Cryo regen gas load (L): 400
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: N2
MFC 1 Cal Factor: .
MFC 1 Size: 100
MFC 1 Type: na
MFC 1 Part Number: na
MFC 2 Gas: na
MFC 2 Cal Factor: na
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: na
MFC 3 Gas: Ar
MFC 3 Cal Factor: na
MFC 3 Size: 50
MFC 3 Type: na
MFC 3 Part Number: na
MFC 4 Gas: ArH
MFC 4 Cal Factor: na
MFC 4 Size: 20
MFC 4 Type: na
MFC 4 Part Number: na
Chamber base pressure (T): 2.0 e-8
Chamber Rate-of-Rise(nTorr/min): 522
Press. and ROR at Startup: no concern
Pressure Rise 1 min: no concern
Pressure Rise 5 min: no concern
Pressure Rise 10 min: no concern
Pressure vs. Gas Flow table: no concern
Process Ar Supply Pressure: 30
Process N2 Supply Pressure: 30
Cryo Regen N2 pressure: 90
Vent Ar pressure: 40
Optional Gas (He): na
O2 (Ch. F): na
H2(Ch. E): na
H2(Ch. C): na
CDA: 88
SLIT VALVE CDA: 82
Cooling Water Flow (GPM): 8.9
Process Type: Reactive PC
Chamber position: C/D
Shutter option: none
chamber body (Al or SST): Al
chamber body part number: 0040-76718
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: n/a
Target No.: n/a
Bakeout/idle power (%): n/a
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): n/a
AMAT Part number Master: n/a
OEM Part Number Master: n/a
AMAT Part number Slave: n/a
OEM Part Number Slave: n/a
Generator Size : n/a
Total DC (12 kwh,24kwh, etc): n/a
Bias Generator : n/a
AMAT Part number : n/a
OEM Part Number: n/a
Bias Generator Size: n/a
Bias Generator Frequency: 13.56MHz / 2MHz (in one generator)
Rf coil generator: COMDEL CDX-2000
AMAT Part number : 0190-23308
OEM Part Number: n/a
RF1 power cable P/N (bias): 0190-01458
RF2 power cable P/N (resonator): 0190-04657
RF cable (match bax to PIB): 0150-22371 (Cobalt/reflow)
Magnet rotation speed (rpm): n/a
Magnet shim thickness: n/a
Magnet type: n/a
Magnet part number: n/a
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): n/a
adaptor p/n: n/a
Kit spacer upper p/n: n/a
Kit spacer lower p/n: n/a
upper shield p/n: Belljar 0040-55456
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield p/n: 0040-86514
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield p/n: 0021-19342
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
shield clamp p/n: Pedestal 0020-19258
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
inner(or mid) shield clamp p/n: Insulator 0020-01903
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
lower shield clamp p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal cover p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
dep ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
cover ring p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
insulator bushing p/n: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
Shutter: n/a
Treatment (Arc spray/Bead Blast): n/a
Treatment roughness (RA): n/a
pedestal type: n/a
pedestal p/n: n/a
heater spacing in mm: n/a
heater spacing in steps: n/a
min heater spacing in mm: n/a
min heater spacing in steps: n/a
max heater spacing in mm: n/a
max heater spacing in steps: n/a
Lift fingers p/n: n/a
Lift hoop p/n: n/a
Cryo restrictor(Y/N): n/a
Cryo restrictor Part Number: n/a
Max Cryo regen gas load (L): n/a
Cryo gate valve (2/3 pos): Pendulum
MFC 1 Gas: He
MFC 1 Cal Factor: 1
MFC 1 Size: 300
MFC 1 Type: He
MFC 1 Part Number: 0010-42845
MFC 2 Gas: Ar2
MFC 2 Cal Factor: 1
MFC 2 Size: 200
MFC 2 Type: Ar
MFC 2 Part Number: 0010-42857
MFC 3 Gas: Ar
MFC 3 Cal Factor: 1
MFC 3 Size: 20
MFC 3 Type: Ar
MFC 3 Part Number: 0010-42843
MFC 4 Gas: (MFC6) H2
MFC 4 Cal Factor: (MFC6) 1
MFC 4 Size: (MFC6) 100
MFC 4 Type: (MFC6) H2
MFC 4 Part Number: (MFC6) 0010-42861
Chamber base pressure (T): 0.0000002
Chamber Rate-of-Rise(nTorr/min): 15000
Press. and ROR at Startup: not necessary
Pressure Rise 1 min: not necessary
Pressure Rise 5 min: not necessary
Pressure Rise 10 min: not necessary
Pressure vs. Gas Flow table: not necessary
Process Ar Supply Pressure: 34.7
Process N2 Supply Pressure: 33.9
Cryo Regen N2 pressure: 100
Vent Ar pressure: 47.7
Optional Gas (He): 30.1
O2 (Ch. F): n/a
H2(Ch. E): n/a
H2(Ch. C): n/a
CDA: 95.7
SLIT VALVE CDA: 85
Cooling Water Flow (GPM): 0.8
Process Type: EnCoReII Ta
Chamber position: 2
Shutter option: yes
chamber body (Al or SST): SST
"chamber body part number: 0040-81737
0040-99334
0040-77918
0040-98657"
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko
Target No.: TAG124
Bakeout/idle power (%): 0
E-Mag Power Supply: 0195-03305
E-Mag Supply Vendor/Type: Kollmorgen
OEM Part Number: n/a
DC Power supply(AE-MDX????): AE-Pinnacle
AMAT Part number Master: 0190-24674
OEM Part Number Master: na
AMAT Part number Slave: 0190-24674
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : ENI - GHW12Z
AMAT Part number : 0190-25530
OEM Part Number: GHW-12Z-12DF2NH-001
Bias Generator Size: 1250w
Bias Generator Frequency: 13.56 Mhz
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
RF1 power cable P/N (bias):
RF2 power cable P/N (resonator): n/a
RF cable (match bax to PIB):
Magnet rotation speed (rpm): 65
Magnet shim thickness: n/a
Magnet type:
Magnet part number:
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.5mm
adaptor p/n: see chamber body
Kit spacer upper p/n: see chamber body
Kit spacer lower p/n: see chamber body
upper shield p/n: 0020-23549
Treatment (Arc spray/Bead Blast): Arc Spray
Treatment roughness (RA): na
lower shield p/n: 0020-44976
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield p/n: 0020-99268
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
lower shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
pedestal cover p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
dep ring p/n: 0020-63125
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
cover ring p/n: 0020-63124
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
insulator bushing p/n: 0200-00590
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
Shutter: 0020-45231
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
pedestal type: Falcon ESC
pedestal p/n: 0010-24456
heater spacing in mm: no concern
heater spacing in steps: -55050
min heater spacing in mm: no concern
min heater spacing in steps: no concern
max heater spacing in mm: no concern
max heater spacing in steps: no concern
Lift fingers p/n: no concern
Lift hoop p/n: no concern
Cryo restrictor(Y/N): na
Cryo restrictor Part Number: na
Max Cryo regen gas load (L): 400
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: N2
MFC 1 Cal Factor: .
MFC 1 Size: 92
MFC 1 Type: na
MFC 1 Part Number: na
MFC 2 Gas: na
MFC 2 Cal Factor: na
MFC 2 Size: na
MFC 2 Type: na
MFC 2 Part Number: CELERITY
MFC 3 Gas: Ar
MFC 3 Cal Factor: na
MFC 3 Size: 50
MFC 3 Type: na
MFC 3 Part Number: CELERITY
MFC 4 Gas: ArH
MFC 4 Cal Factor: na
MFC 4 Size: 20
MFC 4 Type: na
MFC 4 Part Number: CELERITY
Chamber base pressure (T): 2.0 e-8
Chamber Rate-of-Rise(nTorr/min): 522
Press. and ROR at Startup: no concern
Pressure Rise 1 min: no concern
Pressure Rise 5 min: no concern
Pressure Rise 10 min: no concern
Pressure vs. Gas Flow table: no concern
Process Ar Supply Pressure: 30
Process N2 Supply Pressure: 30
Cryo Regen N2 pressure: 90
Vent Ar pressure: 40
Optional Gas (He): na
O2 (Ch. F): na
H2(Ch. E): na
H2(Ch. C): na
CDA: 88
SLIT VALVE CDA: 82
Cooling Water Flow (GPM): 8.9
Process Type: EnCoReII Cu
Chamber position: 4
Shutter option: yes
chamber body (Al or SST): SST
"chamber body part number: 0040-64076
0040-90375
0090-04724
0040-76824"
Slit valve seal (bonded or o-ring): Bonded
Slit Valve door part number: 0040-84391
Target vendor: Nikko
Target No.: TAG131
Bakeout/idle power (%): 0
E-Mag Power Supply: n/a
E-Mag Supply Vendor/Type: n/a
OEM Part Number: n/a
DC Power supply(AE-MDX????): AE-Pinnacle
AMAT Part number Master: 0190-25692
OEM Part Number Master: n/a
AMAT Part number Slave: 0190-25692
OEM Part Number Slave: n/a
Generator Size : 20kw
Total DC (12 kwh,24kwh, etc): 40kw
Bias Generator : ENI - GHW12Z
AMAT Part number : 0190-25530
OEM Part Number: GHW-12Z-12DF2NH-001
Bias Generator Size: 1250w
Bias Generator Frequency: 13.56 Mhz
Rf coil generator: n/a
AMAT Part number : n/a
OEM Part Number: n/a
RF1 power cable P/N (bias):
RF2 power cable P/N (resonator): n/a
RF cable (match bax to PIB):
Magnet rotation speed (rpm): 65
Magnet shim thickness: n/a
Magnet type:
Magnet part number:
Magnet Serial Number (man. Date): no need
Target to magnet spacing(mm): 1.5mm
adaptor p/n: see chamber body
Kit spacer upper p/n: see chamber body
Kit spacer lower p/n: see chamber body
upper shield p/n: 0021-16781
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
lower shield p/n: 0020-85755
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield p/n: 0020-83706
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
shield clamp p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
inner(or mid) shield clamp p/n: 0020-26374
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
lower shield clamp p/n: 0020-02348
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
pedestal cover p/n: na
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
dep ring p/n: 0200-04017
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
cover ring p/n: 0021-16783
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
insulator bushing p/n: 0200-00590
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
Shutter: 0021-25014
Treatment (Arc spray/Bead Blast): na
Treatment roughness (RA): na
pedestal type: Falcon ESC
pedestal p/n: 0010-24456
heater spacing in mm: no concern
heater spacing in steps: -55050
min heater spacing in mm: no concern
min heater spacing in steps: no concern
max heater spacing in mm: no concern
max heater spacing in steps: no concern
Lift fingers p/n: no concern
Lift hoop p/n: no concern
Cryo restrictor(Y/N): na
Cryo restrictor Part Number: na
Max Cryo regen gas load (L): 400
Cryo gate valve (2/3 pos): 3 Position
MFC 1 Gas: na
MFC 1 Cal Factor: na
MFC 1 Size: na
MFC 1 Type: na
MFC 1 Part Number: na
MFC 2 Gas: Ar
MFC 2 Cal Factor: 1
MFC 2 Size: 200
MFC 2 Type: na
MFC 2 Part Number: CELERITY
MFC 3 Gas: Ar
MFC 3 Cal Factor: na
MFC 3 Size: 20
MFC 3 Type: na
MFC 3 Part Number: CELERITY
MFC 4 Gas: ArH
MFC 4 Cal Factor: na
MFC 4 Size: 20
MFC 4 Type: na
MFC 4 Part Number: CELERITY
Chamber base pressure (T): 2.0 e-8
Chamber Rate-of-Rise(nTorr/min): 522
Press. and ROR at Startup: no concern
Pressure Rise 1 min: no concern
Pressure Rise 5 min: no concern
Pressure Rise 10 min: no concern
Pressure vs. Gas Flow table: no concern
Process Ar Supply Pressure: 30
Process N2 Supply Pressure: 30
Cryo Regen N2 pressure: 90
Vent Ar pressure: 40
Optional Gas (He): na
O2 (Ch. F): na
H2(Ch. E): na
H2(Ch. C): na
CDA: 88
SLIT VALVE CDA: 82
Cooling Water Flow (GPM): 8.9
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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