Macquarie Semiconductor and Technology on behalf of Micron Technology, Inc. (VA)

Tokyo Electron Ltd. (TEL) Tactras Vesta

Asset ID: 210334

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Tokyo Electron Ltd. (TEL)

Tactras Vesta

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Manassas, United States

Available date: Currently Available

Tool ModelVesta NV   
ProcessPOLY   
Software VersionVer3.85-Rev501-STD-3.15a   
System Power Rating 200208VAC 3-Phase    
Loading Configuration3 Carrier Stage   
Any equipment manuals available?  Yes / No     
Tool under OEM service contract?   Yes / No    
 DescriptionChemicals / Gases Used 
Chm Position   1Tactras-VestaNVCl2/HBr/NF3/CF4/O2/SF6/Ar/O2/NF3 
Chm Position   2Tactras-VestaNVCl2/HBr/NF3/CF4/O2/SF6/Ar/O2/NF3 
Chm Position   3Tactras-RT3O2/N2  
Chm Position   4Tactras-RT3O2/N2  
Chm Position   5Tactras-VestaNVCl2/HBr/NF3/CF4/O2/SF6/Ar/O2/NF3 
Chm Position   6Tactras-VestaNVCl2/HBr/NF3/CF4/O2/SF6/Ar/O2/NF3 
Description   Qty
     
Loder Module   1
LoadPort Unit   3
VTM   1
LLM   1
VTM DRY PUMP   1
PM   6
GAS BOX   6
RF Generater   6
TMP controller   6
AC Distriction BOX   3


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