Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Tokyo Electron Ltd. (TEL) Tactras Vesta

Asset ID: 209150

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Tokyo Electron Ltd. (TEL)

Tactras Vesta

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

11-3TEL_VESTA_PLY


Tool config is based on original PO, please verify tool details at tool inspection


Process: Poly


Software Version (include revision #): LINUX ver6.15-rev502

System Power Rating: 208 AC 3-Phase

Loading Configuration: 4 Load ports


Chm/Unit Position  1: VESTANV4- Chemical/Gases Used N2, Cl2, HBr, NF3, CF4, O2, SF6, Ar

Chm/Unit Position  2: VESTANV4- Chemical/Gases Used N2, Cl2, HBr, NF3, CF4, O2, SF6, Ar

Chm/Unit Position  3: RT-3- Chemical/Gases Used N2, O2

Chm/Unit Position  4: RT-3- Chemical/Gases Used N2, O2

Chm/Unit Position  5: VESTANV4- Chemical/Gases Used N2, Cl2, HBr, NF3, CF4, O2, SF6, Ar

Chm/Unit Position  6: VESTANV4- Chemical/Gases Used N2, Cl2, HBr, NF3, CF4, O2, SF6, Ar


Tool Config

LM Type: LM Model 1.1 (TAC), Surface treatment of both Interior & Exterior surface will change from Alumina Blast --> Sctch-Brite

Ext. LM: Ext. LM (for LP4/5)

VTM Type: Standard

VTM Type: 4+2

Process Module Position: STD: PM1, PM2, PM3, PM4, PM5, PM6

Power Rack: for PM1, 2, for PM3, 4,for PM5, 6

System Utility I/F Unit: Yes (Stop Valve : N2,He,Air, Water)

Position of Wall: 1) Ballroom, 2) Front through the wall


Loader Module

P-I/O Sensor: None

P-I/O Sensor Cable: None

Extend Cable of P-I/O Sensor: None

Countermeasure of Chemical: Bottom Chemical (FFU)

Light Curtain: None

Addition Storage: Purge System (50wafers)

Mini-E / Pressure Monitor: Yes

Robot / Wafer Contact: Vespel PAD

Signal Tower Mount Position: Upper Left Section of LM of Front:1

Signal Tower Mount Position: Upper Left Section of LM of Maintenance Side:1

Signal Tower Lamp Spec.: Customer Spec


LLM

Corrosion Prevention: Yes

Stage / Wafer Contact: Ceramic Pin

Stage / Wafer Cooling: Water Cooling Stage

Pressure Monitor: Pirani Gauge : PSG101-S

LLM Dry Pump Provide: TEL Arrangement


VTM

Robot Wafer Contact: Chemraz XRZ Taper PAD

Pressure Monitor: Pirani Gauge: PSG101-S

Pressure Monitor: CM: 626B-28272

Gate Valve: PM1, PM2, PM3, PM4, PM5, PM6

Utility Branch Unit / LL Cool: Yes

Utility Branch Unit / N2,v He: PM1, PM2, +PM3, PM4, +PM5, PM6"

Site Kit: PM1, PM2, PM3, PM4, PM5, PM6


AC Dist Box

Voltage/Ampere (config): 3Ph 200-208Vac Non CVCF: 225A/200A- Main, PM1, PM2

Voltage/Ampere (config): 3Ph 200-208Vac Non CVCF: 175A- PM3, PM4 (RT-3 chambers)

Voltage/Ampere (config): 3Ph 200-208Vac Non CVCF: 200A/200A- PM5, PM6


Others

EMO Position: LM STD, PM1, PM3, PM4, PM5

Tool Fixing Bolts: LM + VTM + PM, P. Rack Chiller"

Operation & Maint. Manual: CD-ROM

Parts ID Book: CD-ROM

Reference for Customer Option: CD-ROM

Outer Cable Between AC Racks: 10m

Ingenio ES Spec.: Ingenio ES


PM (Vesta)

Process Chamber Type: VESTA NV4

Leak Check Port: NW25,Valve,Pirani port

EPD: C5K 

TMP: STP-XW3503Y

He B.P.: 1Line(Center CAP)

ATCC: High Temp 4Zone, 120degC

Gas Injection: ARDC (3Lines)

HF Generator: HGA-30C / 100MHz/3Kw(DAIHEN) 

LF Generator: RGA-100B / 13.56MHz/7Kw(DAIHEN)

ESC Assy.: ELECTRODE,BTM 4Z-ST HT / 2L10-151979-1*

FOCUS RING: RING,FOCUS MS 4Z-H45SD / 2L05-250605-1*

RING INSULATOR: RING,INSULATOR TG (110) / 2L05-350148-1*

HOUSING: PLATE,RF(V-4Z G6) / 2L10-253386-1* HOUSING(VESTA),BOTTOM / 2L10-200235-1*

PLATE EXH: PLATE,EXH-CONICAL TG  / 2L10-151208-11

DEPO SHIELD: SHIELD,DEPO LABY-R NV-H / 2L10-152369-1*

RING SHIELD BEL BTM: RING,SHIELD BOTTOM / 2L10-151239-1*

PM (Others): UEL

Lifter Pin: PIN,PUSHER SAPPHIRE SR20 / 2L10-364687-1*

PM (Others): Gap

BASE PLATE: PLATE,BOTTOM 4Z IMP / 2L10-152096-1*

Btm Heater Filter: FILTER ASSY,4Z VESTA / 2L87-101543-1*

Process Chamber Type: RT-3

Leak Check Port: NW25,Valve,Pirani port

Plasma Source Type: R*evolution type AX7695TEL-02 / MKS

N2 Dilution Unit: None

PM Dry Pump Provide: Customer Arrangement

Dry Pump Type: EV-S100N

Dry Pump Type: EV-S200N

Chiller: HRZ010-WS-A1-X005

Chiller Brine: FC-3283

Chiller Hose Length: Site optional: 15/15m or 20/20m


PM (RT-3)

Process Chamber Type: RT-3

Leak Check Port: NW25,Valve,Pirani port

Plasma Source Type: R*evolution type AX7695TEL-02 / MKS


PM Facility

N2 Dilution Unit: None

PM Dry Pump Provide: Customer Arrangement

Dry Pump Type: EV-S100N, Vesta Chamber (customer supplied)

Dry Pump Type: EV-S200N, RT-3 Chamber (customer supplied)

Chiller: HRZ010-WS-A1-X005

Chiller Brine: FC-3283

Chiller Hose Length: Site optional: 15/15m or 20/20m


Gas Box

Gas Box Type: GAS BOX, NV 21230101A

Number of gas lines: 16 lines

Add Line: 3 lines

Filter: 1.125"IGS TYPE (Nihon Pall)

Regulator: N2-Purge Line: PGM-60-5- X0010(CKD)

Regulator: <Process Line> Others:PGM-60-5-X0010(CKD)

Regulator: <Process Line> Cl2:HBr:PGM-60-5-S-X0109 (CKD) SiCl4:PGM-30V-5-S-X0096 (CKD)

Pressure Gauge: Fab Selectable <N2 Line> Digital: ZT67-Y01-B-8 (Standard Option)

Pressure Gauge: Fab Selectable <Others> Digital: ZT67-Y01-B-0 (Standard Option)

Pressure Gauge: Fab Selectable <Cl2/HBr> Digital:ZT67-Y01-B-0 (Standard Option) <SiCl4> Digital:ZT67-Y01-A-0 (Standard Option)

Gas Leak Detection Port: None

Gas Measurement: FMGB (Mutable external-vol) *Installed each Process Chamber

Gas Panel Facilities: Others


Vesta Gas Position

Gas Line 1: FCSP7002D-4CW2- F1600 (N2)

Gas Line 3: FCSP7102DW-4CW2-F300

Gas Line 4: FCSP7002D-4CW2-F2L

Gas Line 6: FCSP7102DW-4CW2-F300

Gas Line 9: FCSP7102DW-4CW2-F500

Gas Line 10: FCSP8002D-4CW2-F1050F50

Gas Line 12: FCSP8002D-4CW2-F2LF100

Gas Line 13: FCSP8002D-4CW2-F2LF200

Gas Line 14: FCSP7102DW-4CW2-F20

Gas Line 16: FCSP7102DW-4CW2-F50

Gas unit(RT-3): 2 lines

Number of gas lines: 2lines

Gas Line 1: FCSP7002D-4CW2- F1600

Gas Line 2: FCSP7010D-4CW2- F7L


LLM Detail

Utility (LM): Regulator : Air/AR25-03-R-X2126 (SMC)


PM Detail

RF Generator: HGA-30C / 100MHz/3Kw(DAIHEN) 

RF Generator: RGA-100B / 13.56MHz/7Kw(DAIHEN)

RF Matcher (HF): HRM-100A(Daihen)

Cable Length (HF): CABLE(VER),RF1 GEN-MAT PM

Cable Length (LF): CABLE(VER),RF2-GEN OUT PM1

Cable Length (LF): CABLE(VER),RF2-GEN OUT PM2

Cable Length (LF): CABLE(VER),RF2-GEN OUT PM5

Cable Length (LF): CABLE(VER),RF2-GEN OUT PM6

HV: HV POLY ASSY,ATCC VER / 2L87-078975-1* 

CONTROLLER,VALVE 65048-JHGH-BHP4

TMP Cont.: CONTROLLER,VAC PUMP SCU-1600

Pressure Monitor (Chamber): SENSOR,PRESSURE_628DRETDF2P

Pressure Monitor (Chamber): SENSOR,PRESSURE_628D11TDE2P

Pressure Monitor (Chamber): BPG400

Pressure Switch (Chamber): SENSOR,PRESSURE_41B13DGA2AA040

Pressure Switch (Chamber): SENSOR,PRESSURE_51A11TGA2BA010


Pin Torque Monitor  

N2 Load Port Exists: No


Main chamber

Gas Line 1: N2 for Single Wafer FCS Diagnostics N2 Purge Line_FCSP7002D-4CW2- F1600 (N2)- TOR N2

Gas Line 2: CAP- TOR CAP

Gas Line 3: Cl2_FCSP7102DW-4CW2-F300- TOR Cl2

Gas Line 4: HBr_FCSP7002D-4CW2-F2L- TOR HBr

Gas Line 5: CAP- TOR CAP

Gas Line 6: NF3_FCSP7102DW-4CW2-F300- TOR NF3

Gas Line 7: CAP- TOR CAP

Gas Line 8: CAP- TOR CAP

Gas Line 9: CF4_FCSP7102DW-4CW2-F500- TOR CF4

Gas Line 10: O2_FCSP8002D-4CW2-F1050F50- TOR O2

Gas Line 11: CAP- TOR CAP

Gas Line 12: SF6_FCSP8002D-4CW2-F2LF100- TOR SF6

Gas Line 13: Ar_FCSP8002D-4CW2-F2LF200- TOR Ar

Gas Line 14: O2_FCSP7102DW-4CW2-F20- TOR O2

Gas Line 15: CAP- TOR CAP

Gas Line 16: NF3_FCSP7102DW-4CW2-F50- TOR NF3


RT3

Gas Line 1: N2_FCSP7002D-4CW2- F1600- TOR N2

Gas Line 2: O2_FCSP7010D-4CW2- F7L- TOR O2


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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