Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Centris AdvantEdge G5 Mesa Poly
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Chamber details:
Chm Position 1: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 2: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 3: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 4: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 5: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 6: MESAⅡ; Chemicals / Gases Used: CL2, BCL3, AR
Chm Position 7: AxiSwll; Chemicals / Gases Used: H2, O2, N2
Chm Position 8: AxiSwll; Chemicals / Gases Used: H2, O2, N2
Remote Components
Cathode chiller:SMC-496 Qty 6/208 AC 3-Phase (Not include on tool sales)
Wall chiller:SMC-H2010 Qty 3/208 AC 3-Phase (Not include on tool sales)
STANDARD SPECIFICATIONS
Software Revision : B27243
FI Software: rel-2.11.0
GEM SEC Revision: 8.10.30.2
Wafer Size: Diameter 300+/-0.05mm(SEMI M28). 775+/-25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Load Port: 4 Loadports
Facility plate: N2 Regulator; Supplied by Micron in floor, CDA regulator 125 PSI on board SMC pressure switch
Loadlock Pressure Monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Transfer Pressure monitor: GAUGE VAC MINI-CONVECTRON W/1-SETPOINT CAJON FTG analog
Transfer Pressure monitor: DCR PRESS ABS 1TORR 1/2FVCR 0-10V-OUT 9P-D .5%ACC
Signal Tower: Red/Yellow/Green/Blue(Front x1 and center section of loadside and maintenance side x1)DNET Light tower, 4 light cover (RAGV) w/CLR DAUG
EMO: Turn to Release (FI x3, Ch x6, AC x1) 3 on FI, 1 on each chamber, 1 on AC Box
Cable Length: HX Control Cable Length 100FT/ Heat Exchanger Hose Length 100FT/ Pump Cable Length 75FT/ Monitor 1 Cables 25 FEET WITH 16 FEET EFFECTIVE
Monitor: DUAL 17 IN FLAT PANEL WITH
KEYBOARD ON ERGO ARM/ REMOTE 17 IN FLAT PANEL ON
STAND
IPUP: BOC Edward iXL180 X2(1 for LL/1 for MF)
HARDWARE CONFIGURATION (Process chamber)
Chamber type: CENTRIS+ ADVANTEDGE G5M
Process kits: Y2O3/Al2O3/SiO2
Gas inject: Y2O3 Solid Nozzle
chamber O-ring: KALREZ
Turbo pump: BOC Edwards/ STP-XA3203CV
RF match: RF Match[RF MATCH, 13.56 MHZ, 8 KVP, 85 A, NAVIGATOR 3013, DPS 232] / RF Match[RF MATCH, 13.56 MHZ, 3 KV, 35 A, NAVIGATOR 1013-B20N, DPS 232]
RF generator: GEN RF 13.56MHZ 3KW APEX 3013 3 PHASE 208V / GEN RF 13.56MHZ 1.5KW APEX 1513 3 PHASE 208V
EPD windows: Quartz
CM Test port: 1/2 VCR Dual
RGA Port: none
Endpoint Type: Endpoint type (Eye-D)
Endpoint Wavelength 1: 200–800nm
Cathode Temperature Monitor: Yes
ESC Power Supply: POWER SUPPLY DC +2KV/-5KV 25W, 24VDC. ESC WITH LOOP COMPENSATION
RF Feed: By inductively coupled plasma source, the ion energy and ion density
Liner: Y2O3 LINER
PROCESS GAS BOX CONFIGURATION (Process chamber)
Gas line 1: Gas line 1-O2 15 sccm GF-125
Gas line 2: Gas line 2-SF6 30 sccm GF-125
Gas line 3: Gas line 3-Heated C4F6 50 sccm GF-125
Gas line 4: Gas line 4-CF4 50 sccm GF-125
Gas line 5: Gas line 5-Cl2 100 sccm GF-125
Gas line 6: Gas line 6-HBr 100 sccm GF-125
Gas line 7: Gas line 7-SO2 100 sccm GF-125
Gas line 8: Gas line 8-CH2F2 100 sccm GF-125
Gas line 9: Gas line 9-SF6 200 sccm GF-125
Gas line 10: Gas line 10-Heated BCl3 200 sccm GF-125
Gas line 11: Gas line 11-HBr 600 sccm GF-125
Gas line 12: Gas line 12-CL2 600 sccm GF-125
Gas line 13: Gas line 13-O2 150 sccm GF-125
Gas line 14: Gas line 14-N2 200 sccm GF-125
Gas line 15: Gas line 15-CF4 300 sccm GF-125
Gas line 16: Gas line 16-CHF3 400 sccm GF-125
Gas line 17: Gas line 17-Ar 500 sccm GF-125
Gas line 18: Gas line 18-He 1000 sccm GF-125
PROCESS GAS BOX CONFIGURATION (Strip chamber)
Gas line 7: Gas line 7-N2 1000 sccm GF-125
Gas line 8: Gas line 8-O2 10000 sccm GF-125
Gas line 10: Gas line 10-H2/N2 5000 sccm GF-125
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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