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Centris AdvantEdge G5 Mesa T2 Poly
Etch/Ash/Clean - Plasma Processing
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool Model: CNTMESA2
System Power Rating: 208 AC 3-Phase
Chamber A1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber A2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber B1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber B2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber C1: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber C2: MESA2; Chamber Chemicals Gases Used:O2, SF6, C4F6, CF4, Cl2, HBr, SO2, CH2F2, BCl3, N2, CHF3. Ar. He
Chamber D1: AxiSWLL; Chamber Chemicals Gases Used: N2, O2, H2/N2
Chamber D2: AxiSWLL; Chamber Chemicals Gases Used: N2, O2, H2/N2
Optional Gas
#1: O2, 15sccm
#2: SF6, 30sccm
#3: C4F6, 50sccm
#4: CF4, 50sccm
#5: Cl2, 100sccm
#6: HBr, 100sccm
#7: SO2, 100sccm
#8: CH2F2, 100sccm
#9: SF6, 200sccm
#10: BCl3, 200sccm
#11: HBr, 600sccm
#12: Cl2, 600sccm
#13: O2, 150sccm
#14: N2, 200sccm
#15: CF4, 300sccm
#16: CHF3, 400sccm
#17: Ar, 500sccm
#18: He, 1000sccm
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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