Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

LAM Research 2300 KIYO EX

Asset ID: 13773

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LAM Research

2300 KIYO EX

Polysilicon Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture:

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Platform Type: Version 2
Process Chbr 1,2,3,4: 2300 Kiyo
Process: W

Software Revision: 1.8.4 - SP2 - HF1
Factory Automation: OHT PIO Sensor
AMHS: AMHS - OHT or manual delivery - Factory Interface
Wafer Size: Diameter 300+/- 0.05mm(SEMI M28), 775 +/- 25um, Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 3 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies
Interface A: Hardware related to EDA
Online Connection: GEM / CIM JGJ (Hardware Interface : Ethernet 100Base-Tx)
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K / OGD10V-4RM-K (CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
UPS on system: Yes
Earth Leakage Breaker: Yes (for Boise only)
Gas Box: GIB of IGS GBX - 16 GIB
Monitor: 2 (Flat Panel Display Touch Screen Type, 1; Front, 1; Side)
Signal Tower: Red/Blue/Orange/Green (Upper Left of Front x1 & Upper right section of loader on maintenance side x0).
EMO: Front x2, Rear x6
Conditioning Station: Yes
Foreline: Heated
Sub-panel: Dual Drop Sub-panel
Interconnect Cables: TM to sub-panel, 50 ft
Pump to TCU: 50 ft
TCU to PM: 50 ft
PM to Pump Interconnect: 50 ft
Inter Locks: Gas Box Door (I/L Signal is sent to the Factory)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Chiller Lower: CTC YR-8020SC.
Coolant: FC-3283
Chiller Hose: 5/8 ID Braided Stainless Flex
RF Generator Bias: GEN, 13.56MHz, APEX, COMPACT, 1500W
RF Generator Source: GEN, 13.56MHz, APEX, COMPACT, 1500W
RF Bias Cable 11 Feet: RF Cable Bias ( 11FT )
RF Source Cable 18 Feet: RF Cable TCP ( 18FT )
Coil Assembly: ASSY, S/G COIL, 1.5T OUT, 2T IN
PCB: ESC Bicep II Filter PCB
PCB: Heater filter PCB
PCB: VIOP Board 1
Exhaust: Pump Exhaust Dilution Box (Configured by Customer)
Wafer ID Reader: Cost Option. IMI automation do not need this function. Keep
Carrier ID Reader: Brooks load port with Hermos.
Endpoint type: Optical Emission Spectroscopy
ESC Type: Tunable ESC
Focus Ring: Quartz
TMP: TMP-Edwards 2200 L/S BOCE (STP-A2203LVS)
Dry Pump: EBARA ESR100WN
Transfer Module Backing Pump: EPX with N2 Gas Module - EPX180
Pressure Monitor: C/M ( Process Monitor ) (MKS ) 1 Torr Lam P/N 796-019891-004
Pressure Monitor: C/M ( Service Monitor ) 625A-14059 10 Torr Lam P/N 685-097330-002
Pressure Monitor: C/M ( Foreline Monitor ) 625A-14059 10 Torr Lam P/N 685-097330-002
Pressure Monitor: Absolute Pressure switch 75 Torr Lam P/N 768-093959-001
Pressure Monitor: Differential Pressure switch Activation 7mm Hg Vac Precision Sensors P/N D48W-14 LamP/N 768-091910-002
Pressure Monitor: He UPC : MKS Type 649A-14943 Lam P/N 797-800733-001
O-Rings: Chemraz
Chamber Isolation Valve: Barrier Seal Door
Wafer Lift Mechanism: Direct Drive
Gas line 1: Gas line 1-Single Contain-Hasteloy/Heated-SiCL4 100 sccm- STEC Z313K
Gas line 2: Single Contain-Hasteloy-CL2 500 sccm- STEC D213
Gas line 3: Single Contain-Hasteloy-HBr 500 sccm- STEC D213
Gas line 4: Single Contain-Hasteloy-CF4 400 sccm- STEC D213
Gas line 5: Single Contain-Hasteloy-O2 500 sccm-STEC D213
Gas line 6: Single Contain-Hasteloy-He 500 sccm- STEC Z313
Gas line 7: Single Contain-Hasteloy-CH2F2 200 sccm- STEC D213
Gas line 8: Single Contain-Hasteloy-Ar 1000 sccm- STEC D213
Gas line 9: Single Contain-Hasteloy-HeO2 (30% O2) 50 sccm- Z313
Gas line 10: Single Contain-Hasteloy-NF3 1000 sccm- STEC D213
Gas line 11: Single Contain-Hasteloy-N2 (Process Grade) 250 sccm- STEC Z313
Gas line 12: Single Contain-Hasteloy-SO2 200 sccm- STEC Z313
Gas line 13: Single Contain-Hasteloy-SF6 50 sccm- STEC Z313
Gas line 14: Gas line 14-Empty (for future use)
Gas line 15: Gas lin

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