Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Ebara FREX300S Poly/STI

Asset ID: 7195

Print spec sheet

Ebara

FREX300S Poly/STI

Poly/STI CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2006

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Tool config is based on original PO, please verify tool details at tool inspection


Software

HMI: 11.5

PLC 1: 7.22

PLC 2: 7.73

PLC 3: 7.77

PLC 4: 10.4

PLC 5: 7.61

PLC 6: 7.61

PLC 7: 7.61

PLC 8: 7.61

ME-20: none

NOVA Interface software: none

Block Controller: No BC


Interface requirements

HMI USB Ports: HMI USB Ports


Factory Interface

Frame Configuration: NONE

WIP Delivery Type: OHT or manual

E84 PI O Sensors and Cables: UPPER E84 Sensors & Cables

Load Port Types: ASYST Iso port


Platen A

Platen Type: ceramic 10-150rpm

Platen End point: NA

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes


Platen B

Platen Type: ceramic 10-150rpm

Platen End point: NA

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes


Platen C

Platen Type: ceramic 10-150rpm

Platen End point: NA

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes


Platen D

Platen Type: ceramic 10-150rpm

Platen End point: NA

Slurry Delivery: Asahi

Platen Cooling Flow Monitor: yes

Platen Cooling Temp Monitor: yes


Polisher

Polishing Head: 300MM AI Head Generation II

Pad Wafer Loss Sensor: Laser type

Atomizer/Spray Bar: Atomizer


Cleaner Module 1

Roll Roll Cleaner Type: Roll Brush

Chemical 1 Upper Control Valve: CLC

Chemical 1 Lower Control Valve: CLC

Chemical 1 Upper Flow Meter: CLC

Chemical 1 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: Nozzle

Bevel Edge Cleaning: yes


Cleaner Module 2

Roll Roll Cleaner Type: Roll Brush

Chemical 2 Upper Control Valve: CLC

Chemical 2 Lower Control Valve: CLC

Chemical 2 Upper Flow Meter: CLC

Chemical 2 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: Nozzle

Bevel Edge Cleaning: N/A


Cleaner Module 3

Roll Roll Cleaner Type: Roll Brush

Chemical 1 Upper Control Valve: CLC

Chemical 1 Lower Control Valve: CLC

Chemical 1 Upper Flow Meter: CLC

Chemical 1 Lower Flow Meter: CLC

Special Chemical Upper: yes

Special Chemical Lower: yes

Special Chemical Upper: yes

Special Chemical Lower: yes

Megasonic: N/A

Bevel Edge Cleaning: N/A


SRD

Spin Rinse Dryer: yes


Facilities

Chemical Connection: Bottom

Exhaust Connection: Top

Gas Connection: Bottom

Drain Connection: Bottom

Chiller: Communication interface


Damage/Missing parts list

Missing- COVER(1) Chemical box cover C-3112-003-0001- Qty 3

Missing- COVER(2) Utility box cover C-3112-002-0001- Qty 3

Missing- COVER PLATE (CHB atomizer box) C-3537-973-0001- Qty 1

Missing- COVER PLATE (CHC atomizer box) C-3537-973-0001- Qty 1

Missing- DIW GUN CASE (R SIDE) C-3131-165-0001- Qty 1

Missing- DIW GUN CASE (L SIDE) C-3131-110-0001- Qty 1

Missing- NOVA 3060 Panel- Qty 1 

Missing- CHA Top ring cover Front cover (Upper) C-3111-816-0001- Qty 1

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales




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Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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