Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer GT PECVD TEOS

Asset ID: 67414

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Applied Materials (AMAT)

Producer GT PECVD TEOS

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2014

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: 12/16/2022

Tool config is based on original PO, please verify tool details at tool inspection


AMAT

Producer GT plus

Software Version: pmB5.4_135

System Power Rating: 110 AC 3-Phase for System

Loading Configuration: 3 LP/9 cooling station/ 25 wafer FOUP


Chm/Unit Position A: TEOS GT TWIN, Process Kit, TEOS A; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2    

Chm/Unit Position B: TEOS GT TWIN, Process Kit, TEOS B; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2

Chm/Unit Position C: TEOS GT TWIN, Process Kit, TEOS C; Chemicals / Gases Used: NF3/AR/TEOS/TEOS1/HE_TEOS/O2    


Process Unit:TEOS PROD

FOUP Opener:Entegris

Gas Panel Schematic for TEOS


System Overview

Technology: DCVD

Platform Type: PRODUCER GT plus

Application: PMD-PMD

Wafer Size: 300MM (12 INCH)

Wafer Shape: SNNF

Position A: (XW) PE TEOS TWIN

Position B: (XW) PE TEOS TWIN

Position C: (XW) PE TEOS TWIN

Position A Process: (10) DELTA MF OXIDE USG

Position B Process: (10) DELTA MF OXIDE USG

Position C Process: (10) DELTA MF OXIDE USG


Factory Interface System 6.4 FI, Options

WIP Delivery Type: OHT WIP DELIVERY

PreAlignment & Centering: YES

Remote Control System Capable: YES

Number of Loadports: Customer Specify

Docked E99 Reading Capability: YES

Load Port Types and Quantity: 300mm STD

Load Port Operator Interface: STANDARD 8 LIGHT

Air Intake Systems: FFU with Hepa - standard

E84 PIO Sensors & Cables: OHT with Side On Sensor

E99 Carrier ID: E99 Carrier RF Tag Reader

Operator Access Switch: YES

5 COLOR CONFIGURABLE LIGHT TOWER: 5 COLOR CONFIGURABLE LIGHT TOWER

Fast Data Gateway Software: NO

eDiagnostics: NO

Interface A: NO


MainFrame Options

LL High pressure diffuser: High presssure diffuser

LL Copley Driver: Copley Driver

LL Slit Valve: KLR9100 + Zalak tabs

Local Center Finder: YES

Robot Blades: Ceramic


Remote Options, Heat Exchanger

System Heat Exchanger Qty: ONE

AMAT HX Hoses and Manifolds: NO

Facilities UPS Interface: NO

Loadlock chamber: AMAT supplied


Ch A, B & C (XW) PE TEOS TWIN

TEOS Chamber Type: TYPE 2

Cleaning Process Diagnostic: NO

Bevel Edge Control: NOT APPLICABLE

Bottom Liner, Side 1: YES

Bottom Liner, Side 2: YES

RF Generator 1: APEX 3K2P (1 per chuck)

RF Generator 2: AE PDX 900-2V 132

Heater: SZ HEATER, TP, 300MM PRODUCER SE/GT

Slit Valve: G67P + Zalak tabs

RF Filter: ASSY, RF FILTER, DZ HEATER, PRODUCER GT

Foreline Combo Valve: 3 inch Heated Combo ISO / TV

RPS: Astron 6L RPS

Divert: TEOS DIVERT

Gas Pallet Type: K1S SURFACE MOUNT VERTICAL

MFCs: Brooks GF125

Gas Pallet: (300XW10)

Line 1: N2 Purge

Line 2: NF3- 5SLM

Line 3: Ar- 10SLM

Line 4: Empty

Line 5: Empty

Line 6: O2 - 15SLM

Line 7: Empty

Line 8: Empty

Line 9: Empty

Line 10: Empty

Line 11: Empty

Line 12: Empty

Line 13: Empty

Line 14: Empty

Line 15: Empty

Line 16: Empty

Line 17: He - 15SLM

Line 18: N2 Purge

Liquid 1: TEOS - 7G

Liquid 2: TEOS - 7G

Liquid 3: N/A

Gas Box: Gas Box

RF Spoon Strap: RF Spoon Strap

Blocker, Silane: Blocker, TEOS HI DEP RATE

Faceplate, Silane: Faceplate, TEOS HI DEP RATE

C-Channel Side 1: C-Channel Side 1, Silane, 300

C-Channel Side 2: C-Channel Side 2, Silane,

Liner, Ceramic Top: Liner, Ceramic Top

Liner, Ceramic Middle: Liner, Ceramic Middle

Liner, Ceramic Bottom: Liner, Ceramic Bottom

Filler, Chamber 1, Producer SE: Filler, Chamber 1, Producer SE

Filler, Chamber 2, Producer SE: Filler, Chamber 2, Producer SE

Pumping Ring, Ceramic C-channel, Side 1 300mm Prod: Pumping Ring, Ceramic C-channel, Side 1 300mm Prod

Pumping Ring, Ceramic C-channel, Side 2 300mm Prod: Pumping Ring, Ceramic C-channel, Side 2 300mm Prod

Centering Ring, Liner, Bottom, 300mm SE: Centering Ring, Liner, Bottom, 300mm SE

Liner, Nitch, 300 SE: Liner, Nitch, 300 SE

Liner, Equalization, 300 SE: Liner, Equalization, 300 SE

Liner, Top, 300 SE: Liner, Top, 300 SE

Ceramic Isolator: ISOLATOR, CERAMIC, CVD LOW K, 300MM PRODUCER

CH AC Box: SPECIFICATION, CH AC BOX, DUAL ZONE HEATER, PECVD, PRODUCER GT PV R0016

Heater Lift: ASSY, SHASTA NON-CAST RIGID HEATER LIFT, PRODUCER SE/GT

Kit, Lift Pin: Kit, Big Foot Lift Pin


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

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