Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Producer SE PECVD SILANE

Asset ID: 210315

Print spec sheet

Applied Materials (AMAT)

Producer SE PECVD SILANE

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: 2004

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 11/26/2022

OEM  AMAT
Tool Model  Producer SE
Process  ARL
Software Version (include revision #) B3.7_64
System Power Rating  200/208V AC 3-Phase for System
Loading Configuration  2 load port
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  PE SILANESiH4,NH3,He,NF3,N2O,Ar,N2
Chm/Unit Position   2  PE SILANESiH4,NH3,He,NF3,N2O,Ar,N2
Tool:   
Process Unit:  Model:
Controller:  FEPC
MFC/Pressure Unit:  Brooks GF125/UNIT 856
Drive Mechanisms:  N/A
FOUP Opener:  TDK
Gas System:  N/A
Exhuast System:  N/A


Defective part: One Ch-A SiH4 Low MFC.

Fab15 confirmed there were no missing parts.


Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.