Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

ASM International Eagle-12 Rapidfire

Asset ID: 209038

Print spec sheet

ASM International

Eagle-12 Rapidfire

PECVD (Chemical Vapor Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture:

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

CVD 15-3ASM_EAGLE12_TEOS ASM EAGLE12 PE TEOS


Since Tool has been de-installed and is stored in an off-site warehouse, no photos provided by Fab15.

FAb15 confirmed there were no missing or damaged parts.


Process: TEOS

Chamber Qty:


OEM  ASM
Tool Model  Eagle
Process  PCTN
Sending Site Workstation Name  15-3ASM_EAGLE12_TEOS
Software Version (include revision #) 2.22D2e
System Power Rating  AC200V/208V AC 3-Phase
Loading Configuration  2 ENHANCED 25 WAFER FOUP (LOADPORT)
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  PCTN-CVD RC1TEOS, O2, NF3, H2, Ar, He, N2
Chm/Unit Position   2  PCTN-CVD RC2TEOS, O2, NF3, H2, Ar, He, N3
Chm/Unit Position   3  PCTN-CVD RC3TEOS, O2, NF3, H2, Ar, He, N4
FOUP Opener:  TDK TAS300E4
Load Port Types  ENHANCED 25 WAFER FOUP     2
WIP Delivery Type  OHT WIP DELIVERY     1
iPUP for transfer and loadlock chambers      1
Local Center Finder     1
HRF Generator 13.56 AX-1000Ⅲ-LC     3
LRF Generator 430kHz AX-1000LFⅢ-LC     3
RPS MKS AX7657-11     3


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