Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

KLA-Tencor Corp. Surfscan SP2

Asset ID: 79192

Print spec sheet

KLA-Tencor Corp.

Surfscan SP2

Particle Measurement

Metrology Equipment

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection

Windows System    Windows XP SP3
Main S/W       NGS 5.4 SR3 HF3
Wafer Size    300mm SEMI Notch

 3 AdvanTag SW CID, Phx, Shinko (load port)
 8 user-configurable LEDs to display the loadport status
 Load/unload button for manual delivery hand-off
 Cassette / wafer mapping which allows the tool to generate a wafer map of the 300mm FOUP and detect wafer presence, empty slots and cross-slotted wafer. The wafer map can be displayed on the user screen and sent to a SECS

 Power: 208 VAC, 3W-N
 CDA: > 28.3 Nl/min, > 6.6791 kg/cm2
 Vac: > 28.317 l/min, > -700 mm Hg

 Powder Coat Panels Kit
 200/300mm Vacuum option
 Optical Filter

Load port    Vacuum 300mm Dual FIMS

 2mm Edge Exclusion
 Oblique Incidence Illumination (High / Standard / Low)
 Normal Incidence Illumination (High / Standard / Low)
 Enhanced XY Coordinates
 Standard Classification package
 LPD-N Classification
 LPD-ES classification
 Grading and Sorting
 Spatial Filter (20 degree)
 Spatial Filter (40 degree)
 Spatial filter (rough films)
 Spatial filter (Back)
 High Sensitivity Inspect Mode
 High Throughput Inspect Mode

 Haze Normalization
 Haze Analysis
 IC/OEM Mfg Surf Quality Recipe

Wafer size.    300mm XY Calibration Wafer with first Article

Others    5 Color Light Tower (RBYGW)

 NFS Client
 E84 enabled for OHT & AGV/RGV
 E87 (Based on E39)
 E40/ E94/ E90 / E116

Handler    Secondary UI, Phoenix, SP2

Main Computer
 Intel®Xeon™ CPU 3.20GHz
 3.5 GB RAM Memory
 3.5" Floppy
 NGS application software

FEC computer
 Intel®Pentium®4 CPU
 512 MB RAM Memory
Damage/Missing parts list
Please inspect tool to reconfirm

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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