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MKS Instruments AX8575-10


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Asset ID: 210931

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MKS Instruments


Ozone Generator

Support Equipment (Fab)

Equipment details:

Date of Manufacture:

Currently Configured for: N/A

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available

Qty- 14

was connected with TEL INDY 

DeptTool IDAssetCategoryStatus
DFTALXB7Q1003GJN001Y0400/0O3 generatorMissing- API, pressure controller
DFTALXB7Q4003GJN001Y0800/0O3 generatorMissing- API, pressure controller, screen
DFTALXB7Q2003GJN001Y1000/0O3 generatorMissing- API, pressure controller
DFTALXB7Q6003GJN001Y1500/0O3 generatorNormal
DFLHAK1243GJN001Y2700/0O3 generatorMissing- API, pressure controller
DFLHKA1253GJN001Y2800/0O3 generatorMissing- API, pressure controller
DFTALXBCQ7003GJN001Y3300/0O3 generatorNormal
DFTALXBCQ6003GJN001Y3400/0O3 generatorNormal
DFTALXBCQ5003GJN001Y3500/0O3 generatorNormal
DFTALXBCQ4003GJN001Y3600/0O3 generatorNormal
DFTALXBCQ3003GJN001Y3700/0O3 generatorNormal
DFTALXBCQ2003GJN001Y3800/0O3 generatorNormal
DFTALXB7P4003GJN001Y1100/0O3 generatorNormal
DFTALXB7P3003GJN001Y1200/0O3 generatorNormal

The AX8575 SEMOZON® is a fully integrated, high output ozone gas delivery system that can be configured as a multi-channel system delivering ozone for up to 4 channels supporting multiple chambers or multiple tools. It has an optional in-rack chiller for ultra-high concentrations. The SEMOZON® AX8575 Ozone Delivery System is specifically designed for applications such as ALD, CVD, TEOS/Ozone CVD, photoresist strip, wafer cleaning, contaminant removal, and oxide growth.

Technical Specs

  • Type
  • Ozone Gas Delivery System
  • Ozone Output
  • 350g/Nm3
  • Flow Rate
  • 40 slm
  • Feed Gas
  • Oxygen, Nitrogen (20 - 100 ppm of total flow)
  • Feed Gas Supply Pressure
  • 50 psig (3.5 kg/cm2) nominal, 60 psig (4.2 kg/cm2) maximum, N2 pressure 10 psi higher than O2 pressure
  • Feed Gas Purity
  • 99.9995% minimum
  • Operating Temperature
  • 41 - 104°F (5 - 40°C)
  • Cooling Water Temperature Required
  • 12 - 21°C with chiller, 5 - 17°C without chiller
  • Cooling Water Filtration Required
  • 100 micron Filtration PWC (with chiller)
  • Cooling Water Quality Required
  • 1 - 3 MOhm DI, Note: Max DI water/Glycol blend: 70/30
  • Cooling Water Minimum Flow Required
  • 10 gpm nominal (water modulating valve range: 2 - 10 gpm) with chiller, 2.5 gpm per Generator (configuration dependant) without chiller
  • Cooling Water Connections Required
  • 1 in. compression (Swagelok®)
  • Cooling Water Heat Load Required
  • 10 kw (based on two generator configuration) with chiller, 5 kw per generator without chiller
  • Voltage Requirements
  • 208 volts AC (±10%), three phase
  • Current Requirements
  • 31 Amps RMS, 50 Amps service (depending on configuration) minimum of 10,000 A.I.C, 60 Amps service with chiller
  • Frequency
  • 50/60 Hz
  • Exhaust Flow Rate
  • 150 cfm (70.8 l/s)
  • Exhaust Type
  • SEMI Category 4 (accidental or emergency release of hazardous gas or vapor)
  • Exhaust Static Pressure
  • 0.10 in. (2.54 mm) H2O minimum, measured at the bottom of the duct flange adapter on cabinet
  • Control Air Pressure
  • 70 - 100 psig
  • Control Air Type
  • CDA or dry nitrogen, 40µm filtered
  • Control Air Fitting
  • 1/4 in. compression (Swagelok®)
  • Exhaust Connection
  • 6 in. diameter duct opening or 4 in. diameter duct opening
  • Dimensions
  • 24 x 75 x 36 in. (610 mm x 1575 mm x 914 mm) (width x height x depth)
  • Relative Humidity
  • 30 - 90% (non - condensing)
  • Weight
  • 600 lbs.(272 kg) for system with one generator, 880 lbs.(400 kg) for system with four generators, 1100 lbs. (499 kg) for system with two generators and internal chiller
  • Compliance
  • CE, S2 - 0302, F47
  • Altitude
  • Up to 3280 feet (1000 m) above mean sea level

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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