Macquarie Semiconductor and Technology on behalf of Micron Technology Utah, LLC
Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Lehi, United States
Available date: Currently Available
| Vendor Tool Serial # | 412183 | |
| Date of Tool Move-In | 31-May-07 | |
| Tool Availability Date | ||
| Tool Current Status | Idle | |
| Process | SOW | |
| Software Version | lp384.8_52 | |
| System Power Rating | 208v 3 Ø 60Hz | (eg. 110 AC 3-Phase for System) |
| Loading Configuration | 3 load ports | (eg. 6 load positions for furnace or dual auto-indexer loaders) |
| Chm Position 1 | Slurry A | |
| Chm Position 2 | Slurry B | none |
| Chm Position 3 | Slurry C | |
| Chm Position 4 | Slurry D | none |
| Chm Position ___ | Brush Box1 Chem 1 | TMAH 0.063 |
| Chm Position ___ | Brush Box2 Chem 1 | TMAH 0.063 |
| Chm Position ___ | _______________________ | ___________________________ |
| System Configuration | ||
| Description | ||
| Tool: | ||
| Polisher - 3 platens | ||
| Polisher - 4 heads (head 4 rotation is non-functional) | ||
| Dry Metrology 3090 next | ||
| Cleaner - Running Beam | ||
| Cleaner Modules - Input Buffer, Megasonics, 2 brush Boxes, Desica Marangoni Dryer | ||
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
Get in touch
Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.