Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal


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Asset ID: 94367

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 9/2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

No missing or damaged parts from de-installed and warehoused tool.

Please inspect the tool to re-confirm.

Software Version - AMS 2.8_82

System Power Rating - 208VAC 3-Phase

Loading Configuration - 2 Carrier Stage


 Vendor      Model    Chm                

Chm/Unit Position  1

Centura     G5            BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43


Chm/Unit Position  2

Centura     G5            BCL3/CL2/O2/N2/SF6/CHF3/CF4/AR/FC3283/FC43


Chm/Unit Position  3

Centura     Asp          CF4/O2/N2


Chm/Unit Position  4

Centura     Asp          CF4/O2/N2


Tool has been de-installed and is stored in an off-site warehouse.

Shipping kits have been installed on a FI only for rigging.

The shipping kits are required to be shipped back to Fab15.



Tool is configured with endpoint.

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

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