Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Applied Materials (AMAT) Centura AP AdvantEdge G5 Metal

Asset ID: 210308

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Applied Materials (AMAT)

Centura AP AdvantEdge G5 Metal

Metal Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2010

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/7/2022

OEM  Applied Materials
Tool Model  Centura AP AdvantEdge G5
Process  Metal
Software Version (include revision #) AMS 3.5_105
System Power Rating  208VAC 3-Phase
Loading Configuration  3 Carrier Stage
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  Centura G5BCL3,CL2,O2.N2,SF6,CHF3,CF4,AR
Chm/Unit Position   2  Centura G5BCL3,CL2,O2.N2,SF6,CHF3,CF4,AR
Chm/Unit Position   3  ASPCF4,O2,N2 
Chm/Unit Position   4  ASPCF4,O2,N2 



Description   
Tool:   
Process Unit:Centura  Model:G5
Controller:FES/FIS   
MFC/Pressure Unit:AERA PI-980/BROOKS INSTRUMENT GF125 
Drive Mechanisms:YASKAWA FI Robot  
FOUP Opener:refarence picture   
Gas System:MFC/FRC   


Missing parts: two INR-496-003D items and one INR-498-016C item.

Fab15 confirmed there were no damaged parts.

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