Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: 9/30/2022
Tool is operating in clean room.
Shipping brackets and kits will need to be supplied by buyer.
Buyer is responsible for arranging disassembly and rigging for tool.
Missing or damaged parts: Not reported. Please inspect to confirm.
|[Chambers A, B and C)|
Chamber Type: Ultima X HDP CVD
Gas Config(sccm)=MFC Full Scale
RF Source 1.8-2.17MHz, max 10000 W
RF Bias 13.56MHz, max 9500W
RF RPS 400kHz, max 6000W
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