Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Qty-3- Not overhaul
|Module||S/N||Tool / Location|
|Peak Speed||600 m3h-1|
|10000 l min-1|
|Ultimate Vacuum||7 x 10-4 mbar|
|5.3 x 10-4 Torr|
|Typical shaft seal nitrogen flow||4 slm|
|Typical cooling water flow at 15 psi pressure drop||240 l h-1|
|4 l min-1|
|Power input at ultimate||3.4 kW|
|Rated motor power||6.1 kW|
|Oil Capacity||1.43 l|
All figures are typical without gas ballast.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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