Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Date of Manufacture:
Currently Configured for: N/A
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Qty 10- Not overhaul (pump controller is not included)
| Area | Asset description | overhaul | Fixed Asset No. | S/N | Location | FAB |
| FS | ADS1802H | N | 3A52AA010900 | AP2502810 | A9.5-3.5 | FAB B |
| FS | ADS1802H | N | 3B52AA052800 | KAP2621080 | A9.5-3.5 | FAB B |
| FS | ADS1802H | N | 3A52AA051500 | AP2509555 | A9.5-3.5 | FAB B |
| FS | ADS1802H | N | 3B52AA053300 | KAP2621087 | A9.5-3.5 | FAB B |
| FS | ADS1802H | N | 3B52AA080500 | AP2610734 | A5.5-10 | FAB B |
| FS | ADS1802H | N | 3B52AA081500 | AP2702100 | A5.5-10 | FAB B |
| FS | ADS1802H | N | 3B52AA081200 | AP2701065 | A23-3 | FAB B |
| FS | ADS1802H | N | 3B52AA080600 | AP2609924 | A23-3 | FAB B |
| FS | ADS1802H | N | 3B52AA081700 | AP2702102 | A23-3 | FAB B |
| FS | ADS1802H | N | 3B52AA081400 | AP2701110 | A23-3 | FAB B |
Technical data
60 Hz Peak pumping speed (m3 /h) : 1700
60 Hz Typical ultimate pressure (no purge) (mbar) : 5 x10-4
60 Hz Max. ultimate pressure (no purge) (mbar) : 9 x10-4
60 Hz Ultimate pressure (35 SLM purge) (mbar) : 6 x 10-3
50 Hz Peak pumping speed (m3 /h) : 1700
50 Hz Typical ultimate pressure (no purge) (mbar) : 8 x10-4
50 Hz Max. ultimate pressure (no purge) (mbar) : 9 x 10-4
50 Hz Ultimate pressure (35 SLM purge) (mbar) : 6 x 10-3
Cooling water, quick connectors : 1/4“ NPT
Cooling water typical : 5 l/mn
Inlet connection : DN 100 ( ISO-K / KF )
Outlet connection : DN 40 ( ISO-KF )
Weight : 540 kg
N2 purge : 0 for LM versions, depends on application for P and H versions
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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