Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)

Applied Materials (AMAT) Producer Etch eXT Dielectric

Asset ID: 211204

Print spec sheet

Applied Materials (AMAT)

Producer Etch eXT Dielectric

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2016

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Taoyuan, Taiwan

Available date: Currently Available


Tool config is based on original PO, please verify tool details at tool inspection


Tool Model: PREXT

Software Version: B3.5_102

System Power Rating: 208 AC 3-Phase for system

Loading Configuration: 3 load ports


Chamber A: PRODUCER twin chamber; Chamber Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar

Chamber B: PRODUCER twin chamber; Chamber Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar

Chamber C: PRODUCER twin chamber; Chamber Chemicals Gases Used: Cl2, NF3, H2, CH2F2, CF4, O2, N2, CHF3, Ar


Optional Gas

#1: Cl2, 250sccm

#2: NF3, 500sccm

#3: H2, 2000sccm

#4: CH2F2, 100sccm

#5: CF4, 700sccm

#6: CF4, 100sccm

#7: O2, 100sccm

#8: O2, 2000sccm

#9: N2, 200sccm

#10: CHF3, 200sccm

#11: Ar, 100sccm

#12: Ar, 1000sccm


Damage/Missing parts list

Please inspect tool to reconfirm

Dry pumps and customer provided items not included on sales

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Product Images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.