Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2013
Currently Configured for: To be determined
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Korea, Republic of
Available date: TBD
Unity Me Mainframe
Transfer Robot: Yaskawa Electric XU-BDB1300
Qty 1 - DRM Process Chamber
Bottom Electrode: 1D10-150053-11
Upper Electrode: 1D10-204338-13
Focus Ring: 1D10-350791-11
Plate Baffle: 1D10-102848-13
Shield Depo: 1D10-315183-15
Ring Insulator: 1D05-300354-11
Cover Bellows: 1D10-204418-12
Turbo Pump: STP-A1303W1
Process Gases: C4F8, O2, Ar, He, CHF3
Qty 1 - RF Rack
ENI GHW-25A
Qty 1 - Monitor Panel
Qty 1 - AC Rack
Qty 4 - Dry Pumps
Lot Vacuum HD120
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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