Macquarie Equipment Trading on behalf of Micron Technology Utah, LLC

Tokyo Electron Ltd. Telius SP-305 SCCM

Asset ID: 207547

Print spec sheet

Tokyo Electron Ltd.

Telius SP-305 SCCM

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2007

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Lehi, United States

Available date: Currently Available

Vendor Tool Serial #  H01394  
Date of Tool Move-In     
Tool Availability Date     
Tool Model  TEL SCCM  
Process  COSI  
Software Version     
System Power Rating   208 AC 3-Phase 60 Hz  
Loading Configuration  5 Loadports  
Chm/Unit Position   1  SCCMC4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, N2, He, Ar
Chm/Unit Position   2  SCCMC4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, N2, He, Ar
Chm/Unit Position   3  SCCMC4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, N2, He, Ar
Chm/Unit Position   4  SCCMC4F6, C4F8, N2, O2, CH2F2, CHF3, CF4, N2, He, Ar


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