Macquarie Equipment Trading on behalf of Micron Technology, Inc. (Boise)

LAM Research 2300 Exelan

Asset ID: 205964

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LAM Research

2300 Exelan

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: 2001

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Boise, United States

Available date: Currently Available

Tool Status: Deinstalled and moved to the warehouse.


Configuration. Audit to verify.


DRY ETCH - 04-3LAM_EXELCU_0200 - CU


These items are included in the asset:

  • Front End
  • Control Module
  • Qty3 load ports
  • Electrical Module
  • Qty 1 Exelan Chamber
  • Qty 2 Gas boxes
  • Qty 1 RF Unit


Additional Information:


  • Chamber does not have any consumable parts left in the chamber.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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