Macquarie Semiconductor and Technology on behalf of Micron Memory Taiwan Co., Ltd. (F16)
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007-01-01
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taichung City, Taiwan
Available date: Currently Available
Tool config is based on original PO, please verify tool details at tool inspection
Tool is configured with 3 chamber
Standard Specifications
Software Revision: Linux 6.75 Rev 000-VSTD6.75a
Lot Stability Dummy SW: Software for running lot stability wafer.
OEE WPH Software: SW only for OEE throughput upgrade.
Wafer Size: Diameter 300+/- 0.20mm(SEMI M1.15), Notch
Carrier: FOUP (Comply with SEMI E47.1 (25wafers))
Inter Face: 4 carrier stage (Continuous flow operation) with Semi compliant MENV and FIMS assemblies
Online Connection: GEM / CIM GJG (Hardware Interface : Ethernet 100Base-Tx)
Utility Box: Regulator : Air/AR2500(SMC), N2/SQ-420E(VERIFLO), He/SQMICRO(VERIFLO)
Utility Box: Manual Valve : OGD20V-6RM-K/OGD10V-4RM-K(CKD)
Utility Box: Pressure Gauge : Bourdon Gauge
Loader Mod Corrosion Prevent: SUS Parts, Ball screw & Liner guide : PTFE Coating
Load Lock Pressure Monitor: Pressure Switch : VSA100A (INFICON)
Load Lock Pressure Monitor: Pirani gauge : TTR211S LEYBOLD)
Load Lock Pressure Monitor: CM : 626A01TDE (MKS)
Maintenance Monitor: 2 (Flat Panel Display Touch Screen Type)
Water Leak Detector: 4 (LM;1, each PS;1)
Signal Tower: Red / White / Green / Blue
EMO: 7(Front:2, Rear:5)
Cable Length: 20m (Interconnection), 19 (Top RF cables),20m(Btm RF cables)
Inter Locks: External (When the I/L signal is received from Factory, gas valves are closed)
Fittings: No Brass Fittings
Supporting Remote Units
Chiller: Daikin UBRPD5A-2T2
* stopped production
Coolant: Lower:FC3283, Upper:FC40
Chiller Hose: BRINE HOSE Top/Btm : 18/19M
Handy Maintenance Controller: LCD DISPLAY UT3-TLN21-A
RF Generator TOP: AGA-50B2
RF Matcher TOP: AMN-50B2
RF Generator Bottom: WGA-50E
Matching Controller: WMN-50H2(2MHZ/5KW)
Pen Record Box: N/A
Loader Module: SELME2112ZS2-AR5(M)
BX80-071026-15
LOAD PORT: SELOP12F25-30B-14
BX80-070965-14
DRIVE UNIT: SBX92102926
BX80-070974-21
READER OPTICAL: None
Carrier ID Reader: N/A
APC: 10 INCH (250MM)
Hardware Configuration
Proc Chbr 1,2,3: SCCM Oxide; Y203 Coating
Chamber hardware: FCC
Endpoint type: SE2000ii
ESC type: Ceramics ESCwith STD Vpp
Focus ring: 3.4mm
Thunderwall He Gas Inlet: Ceramic Thunderwall with Ceramic pusher pins.
Polished focus ring: N/A
FC lower insulator: INSULATOR,LOWER (RE)
3D10-250542-11"
Magnet Shield: O
Oring for Chbr Body-Depos: Armorcrystal
Chemraz SC657"
CEL Body ASSY: Upper electrode constant temperature control
TMP: FT-3301
(MITSUBISHI)"
TMP Back Pressure Monitor: 51A11TGA2BA003 (MKS)
Dry Pump: ESR100WN:Ebara
Final Valve, Heater: Valve; AGD21V-6RM-GWL4 (CKD)
Filter: Filter; CEP-TM_HL-VR-03PB (Toshiba Ceramic)
APC: 10 INCH (250MM)
Pressure Monitor: C/M (Process Monitor) : 627BRETDD2P (MKS), 45deg, 30Pa
Pressure Monitor: C/M (Self Check) : 627B11TDC2P (MKS), 45deg, 1330Pa
Pressure Monitor: B.A. Gauge (CM Calibration) : BPG400 (INFICON), 2.0x10-5 ~ 0.1Pa
Pressure Monitor: ATM Switch : 41A13DGA2AA040 (MKS)
Pressure Monitor: Pressure Switch : 51A11TGA2BA010 (MKS), H2/fluoro gas
Gas Box Configuration
Gas Line 1: (01) NONE / F300
Gas Line 2: (02) CH2F2 / F80
Gas Line 3: (03) C4F8 / F122
Gas Line 4: (04) C4F6 / F180
Gas Line 5: (05) Ar / F2000
Gas Line 6: (06) O2 / F1300
Gas Line 7: (07) O2 / F65
Gas Line 8: (08) CO / F200
Gas Line 9: (09) CHF3 / F200
Gas Line 10: (10) CF4 / F300
Gas Line 11: (11) NONE / F50
Gas Line 12: (12) NONE / F500
Gas Line 13: (13) C4F6 / F39
Gas Line 14: (14) CHF3 / F50
Gas Line 15: (15) Ar / F110
Gas Line 16: (16) O2 / F10
Purge: One line serves up to 16 lines per box
Filter: CNF1004USG4(Nihon Pall)
GTMF3200F4A-VM4(Nihon Pall)
Regulator: N2-Purge: 12-1A21IGS2W(TESCOM)
Filter (N2): CNF1004USG4(Nihon Pall)
GTMF3200F4A-VM4(Nihon Pall)
Valve: Primary Side(Utility - FCS) :
Mega mini(FUJIKIN)
Valve: Secondary Side(FCS - PC) :
Mega One (FUJIKIN)
Piping: Dual piping at gas line from gas box to Final Valve & exhaust through gas box
Gas Leak Detection Port: 5 Ports (6.35mm, Swagelok type)
Final Pressure Switch: 51A (MKS)
Pressure Gauge: Bourdon Gauge(0.2Mpa)
(GAS1: Digital Gauge)
Pressure Gauge: Bourdon Gauge(0.4Mpa)
SP3 Gas Line Connection: Single Line Drop
GBROR: None
Process Kit Configuration
WINDOW, SHIELD DEPO(DRM2) QRTZ: WINDOW, SHIELD DEPO (DRM2) QUARTZ (ES1D05-400022-14)
WINDOW DEPO SAF0.5(DRM2) SAPPh: WINDOW DEPO SAF0.5(DRM2) SAPPHIRE (ES1D10-406499-11)
SHIELD, UP 300MM RING-Qrtz: SHIELD, UPPER 300MM RING - Quartz (ES3D05-200094-12)
Insulator, ESC Enclosure (COC): Insulator, ESC Enclosure (COC) - Quartz (ES3D05-300142-13)
Cover Ring, 360- L (M) - Qrtz: Cover Ring, 360- L (M) - Quartz (ES3D05-300243-11)
RING, BTM SHIELD Y-AL, SE: RING, BTM SHIELD Y-AL, SE (ES3D10-100844-11)
PLATE,EXHAUST Y-AL, SE: PLATE,EXHAUST Y-AL, SE (ES3D10-100845-11)
SHUTTER,BTM TYPE Y-AL, SE: SHUTTER, BTM TYPE Y-AL, SE (ES3D10-101152-13)
SHIELD,DEPO: SHIELD,DEPO (ES3D10-100910-12)
Focus Rg, 360-302-COC: Focus Rg, 360-302-COC (ES3D10-250007-11)
Insultr, lwr T32-R6-BL-NC: Insulator, lower T32-BI-NC
WINDOW,DEPO CLP: WINDOW,DEPO CLP/Y2O3-100P(N) (ES3D10-350344-12)
SCREW PIN LOCK, Cerazol: Ceramic (ES3D10-404821-11)
Si Upper Electrode: Si Upper Electrode (ES3D10-302020-11)
CEL ASSY: CEL ASSY (ES3D87-003411-14)
ESC ASSY: ESC ASSY (with ceramic pusher pins) (ES3D87-052854-11)
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps, HDD and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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