Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: Jun., 2011
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
| OEM | TEL | ||
| Tool Model | Tactras-Vigus | ||
| Process | Oxide | ||
| Software Version (include revision #) | Ver5.05-Rev502-STD-5.05a | ||
| System Power Rating | 200 AC3-Phase for System | ||
| Loading Configuration | 3 load port | ||
| Vendor Chm Model | Chemicals / Gases Used (not to use Micron Proprietary names) | |||||
| Chm/Unit Position 1 | Loder Module | - | ||||
| Chm/Unit Position 2 | VTM | N2 | ||||
| Chm/Unit Position 3 | Purge storage | ⁻ | ||||
| Chm/Unit Position 4 | Process Module 1 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | ||||
| Chm/Unit Position 5 | Process Module 2 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | ||||
| Chm/Unit Position 6 | Process Module 3 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | ||||
| Chm/Unit Position 7 | Process Module 4 (VIGUS-LK2) | C4F8,C4F6,CH2F2,O2,CHF3,CF4,CO,N2,Ar,He,H2,CH3F,CO2 | ※PM4 is Vigus-LK2 chamber | |||
| Chm/Unit Position 8 | Process Module 5 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | ||||
| Chm/Unit Position 9 | Process Module 6 (VIGUS) | C4F8,C4F6,CH2F2,COS,O2,CHF3,CF4,CO,N2,Ar,He | ||||
| Tool: | ||||
| Process Unit: | Model: | Remark | ||
| Controller: | EC | |||
| MFC/Pressure Unit: | FCS Device-net I/F Type
(Fujikin) SEC-Z514MGXCS15-14W3 CM1：DNARETGAFKNV633 (MKS) CM2：DMA11TGAEKNN633 (MKS) | PM1,2,3,5,6 PM4 | ||
| Drive Mechanisms: | Yasukawa LM：z軸、R軸、H1軸、H2軸、θ：ACｻｰﾎﾞﾓｰﾀｰ TM：y軸(ｽﾗｲﾀﾞ):ACｻｰﾎﾞﾓｰﾀｰ r軸,θ軸:DDﾓｰﾀｰ | |||
| FOUP Opener: | KWF-12C-T1(K-BL-601HAC1-SO-E) | |||
| Gas System: | 1.125 inch 集積ﾀｲﾌﾟ(CKD) 13 + 3(Edge-Add-Gas) | |||
| Exhuast System: | TMP（TMP-W3503LMC(T4)(VG250)(SHIMADZU)） TM/LLM PUMP：MU100U-147 (KASHIYAMA) | |||
Chamber type is as follows.
PM1: VIGUS1 HARC
PM2: VIGUS1 HARC
PM3: VIGUS1 HARC
PM4: VIGUS-LK2
PM5: VIGUS1 HARC
PM6: VIGUS1 HARC
F15 confirmed that 6 bottom chillers are not included in tool for sale.
No missing or damaged parts.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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