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Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Tokyo Electron Ltd. (TEL) Tactras Vigus

Asset ID: 12053

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Tokyo Electron Ltd. (TEL)

Tactras Vigus

Dielectric Etch

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: Jun., 2011

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 3/4/2022

Tool is running in productions line in clean room.

[Chamber A]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

[Chamber B]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
RF LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

[Chamber C]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
RF LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

[Chamber D]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
RF LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

[Chamber E]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
RF LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

[Chamber F]
Chamber type:Vigus
Gas config. (sccm)=FCS full scale
C4F8(88.1)/C4F6(103.1)/CH2F2(57.7)/COS(43.1)
O2(93.5)/O2(1870.5)/CHF3(188.2)/CF4(280.5)
CO(300)/N2(500)
Ar(1420.5)/C4F6(50.3)/C4F8(22.5)/O2(28.1)
RF HF 40.68MHz, max 2700W
RF LF 3.2MHz, max 4500W
Temp Top +30~+150?
Wall +30~+60?
ESC 0~+80?

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