Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

ASM International Eagle XP4

Asset ID: 210312

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ASM International

Eagle XP4

ALD (Atomic Layer Deposition)

Deposition Equipment

Equipment details:

Date of Manufacture: APR 2020

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

OEM  ASM
Tool Model  XP4
Process  ALD-HFOX
Software Version (include revision #) v1.80a04-12
System Power Rating  380 AC 3-Phase
Loading Configuration  3 Load Port
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  1157-259-01HfCl4 
Chm/Unit Position   2  1069-556-01UPW 
Tool:   
Process Unit:Pulsar Reactor Chamber Model:AXIS
Controller:   
MFC/Pressure Unit:Horiba STEC Z7xx series  
Drive Mechanisms:CDA, Electricity  
FOUP Opener:3 ports   
Gas System:P-N2,UPW,HfCl4   
Exhuast System:EDWARDS Pump(iXH610/iXH1000N)  



Fab15 confirmed there were no missing or damaged parts.


Please inspect tool to reconfirm.

Dry pumps and customer provided items are listed in tool's configuration but not included in tool for sale.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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