Macquarie Semiconductor and Technology on behalf of Macquarie Finance Korea Co., Ltd.
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Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2018-01-01
Currently Configured for: To be determined
Current Equipment Status: Available
Location of Equipment: Gyeonggi-do, Korea, Republic of
Available date: Currently Available
2300 System
4*2300 Flex GX
1*2300e4 Platform
2300 PROCESS MODULE
2300 FLEX GX OPTIONS
4*Heated Foreline Manometer
4* Chemraz Vacuum Valve
4* NSR102216, RPDB for GX
4* NSR102105, FLEX GX PM
2300 Flex GX Quick Clean Kit
2300 GAS BOX
4*2300 FLEX GX JETSTREAM GAS BOX
36* Jetstream Gas Line Heated
16* Gas Line Additional Tuning
4* Gas Line Non Standard MFC
9* NSR102690, Flex GX Gas Line
8* Flex GX Tuning Gas Option
1* Facility Interface Box (System)
17* Facility Interface Box (Per Line)
1* AFVi
2300 PLATFORM (E)
1*3 FOUP TDK
4* Hermos Carrier ID
1*WIDS Btm Read
1*RGV/OHT PIO Sensor
1*Conditioning Station (7 Wafer)
1*25 Slot Aux Buffer (Corr Res)
1*VTM Pump: Edwards (EPX)
1*Vespel Single Sense
1*User Interface: Side and Front Monitor U
1*System UPS Circuitry
1*Earth Leakage Breaker
1*Cable: TM-Subpanel, 100ft
1*Signal Light Tower, R-O-G-B Slim Line
1*Light Curtain
1*Input Buffer Corr Res w/o Exh
1*Sys Calibration and Alignment
1*Service Step for PM
1*VTM Robot Lift
1*Robot CDM
1*Light Tower Buzzer
1*Metric to Inch Conv. Fittings
1*APCS
1* NSR10702, N2 Flow Monitoring on UPC
2300 PERIPHERALS
Not Included: 4*Cust. Supply: Non-Qual Pump
Not Included: 4*Cust. Supply: Non-Qual 2 Ch TCU
4*Pump Exhaust Dilution Box
1*Dual Drop Subpanel (2 Ch TCU)
2300 SOFTWARE
1*TEK Software
1*Wafer Flow Tuning
1*APC Recipe Tuning Host
1*2nd HSMS
1*NSR8423, Hardware Firewall
1*EDA2
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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