Macquarie Semiconductor and Technology on behalf of Qorvo US, Inc.

LFE Plasma Systems APE-110

Asset ID: 208214

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LFE Plasma Systems

APE-110

Plasma Cleaner

Cleaning

Equipment details:

Date of Manufacture:

Currently Configured for: 100mm

Current Equipment Status: Available

Location of Equipment: Farmers Branch, United States

Available date: Currently Available

LFE Plasma Systems APE-110

Q'ty : 2


Controller: Intel 8052 microprocessor

Digital mass flow control

Digital metering for RF power and chamber pressure

Process Gas: Delivered at 5 psig, 35 kpa

Flow Rate: 1/2 1500 sccm max

Frequency: 13.56 mHz

System electrical: 115VAC, 50/60Hz, 15A

Pump requirements: 23cfm (not included)

Compressed Air: 65-85 psig, 450-858 kpa.

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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