Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Dainippon Screen Mfg. Co. (DNS) SS-3000

Asset ID: 209669

Print spec sheet

Dainippon Screen Mfg. Co. (DNS)

SS-3000

Wafer Scrubber

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: AUG. 2003

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

WET 15-3DNS_SS30_SCR_04SSDS DNS SS3000 SCR


Defective parts: Fab15 confirmed there was one defective part of Service panel. Please see a photo of the defective part.

CONFIGURATION & PHOTOS AVAILABLE. Please ask your sales person.


OEM  DNS
Tool Model  SS3000
Process  Scrubber
Software Version (include revision #) V212F000
System Power Rating  208AC 3-phase
Loading Configuration  3 load ports


   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  U03 SS(Surface)CO2Water 
Chm/Unit Position   2  U04 SS(Surface)CO2Water 
Chm/Unit Position   3  U05 SSR(Backside)CO2Water 
Chm/Unit Position   4  U06 SSR(Backside)CO2Water 
Chm/Unit Position   5  U07 ReverserN/A 
Chm/Unit Position   6  U08 ReverserN/A 


Description     Qty
Tool:      
Process Unit:  Model:Remark  
Controller:  Process Modules  1
MFC/Pressure Unit:  Loadport  3
Drive Mechanisms:  Power supply unit  1


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