Macquarie Semiconductor and Technology on behalf of Inspire Technologies, Inc.

Entegris KA198-80M


The images and data contained herein is owned by Macquarie and is intended for use only by potential purchasers of goods shown herein. Except for such permitted usage, no other use of the images and data is permitted and such images and data shall not be exhibited or shown in any websites or social media or for any commercial purposes without Macquarie’s written permission. Therefore, no seller of goods like the goods shown herein has any right or authority to show or exhibit any images or data shown herein.

Asset ID: 210630

Enquire about this product Print spec sheet



Wafer Cassette

Wafer Automation / Wafer Environment

Equipment details:

Date of Manufacture: 2003-01-01

Currently Configured for: 200mm

Current Equipment Status: Available

Location of Equipment: Caldwell, United States

Available date: Currently Available

DOMESTIC SALE: Only offers from US entities will be considered. Seller will not clear the equipment for export or act as Exporter of Record from the United States.

Estimated 6000, used 200mm Entegris STAT-PRO 3000, PEEK cassettes.

Material Specifications


  • Advanced Wafer Transport carrier material
  • Static dissipative blend of polyetheretherketone (PEEK) and carbon fiber
  • Temperature limits :

Continue use : 120°C (248°F)

Wafer insertion : 340°C (644°F)

General Specification

Open side wall style

Locating track notches at center of the thirtrrnth pocket

Pins and holes on the top rail

Wafer capacity : 25

D1 dimension : 25.4 mm (1.00")

Pocket spacing : 6.4mm (0.25")

Pocket flat : 1.7mm (0.07")

Product images

The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.

Learn more -

Enquire about this product

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.

Related products

No results message:
Displayed when filters returns no results.

We couldn't find any items that match your criteria.

Please try a different keyword.

Service unavailable:
Displayed when filter service cannot be reached.

Sorry, this service is currently unavailable.

Please try again later.

Get in touch

Have a question for our team?

Ask about our equipment solutions, ranging from Macquarie equipment inventory sales, sourcing programs, surplus disposition options, and direct equipment purchases.

I agree to receive further communication from Macquarie Group Limited in accordance with its Privacy Policy, as amended from time to time.