Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)
Date of Manufacture: 06/2014
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
DIFFUSION - 15-3TEL_A303I_HT - 303I -
Tool has stopped operations since April 22, 2020 and is still connected with facilities. Then it can be re-powered on.
A HARD DISK DRIVE WILL BE REMOVED.
Other missing or damaged parts: Not reported.
Tube Material:Quartz
Boat Material:Quartz(Twin Boat)
Production wafes:75
Process Gas:Ar(F.S:15slm),O2(F.S:20slm),P-N2(F.S:50slm)
Water generating Type:External Torch
MFC Maker:HITACHI-Metals
MFC Model:FC-D98series
Process Temp:600-1000deg
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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