Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
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Date of Manufacture:
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: 7/25/2025
Tool config is based on original PO, please verify tool details at tool inspection
Micap #: 1303636
Micron MISTI/LID #: SOXDBCZ200
Vendor Tool Serial #: 400810
Any defective or missing parts: No
Any modification/conversion/refrofit was perform to the tool? No
OEM: AVIZ
Tool Model: RVP300+
System Power Rating: 480/120V
Loading Configuration: 4 lots
Retrofit Part Type 1: NA
Chamber Name 1: NA
Not Sold with Tool Description 1: NA
N2 Load Port Exists 1: No
N2 Load Port Exists 2: No
Optional Gas 1: NA
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
Process: ATMOXANNL
System, General Specification
Heater element Model: FURNACE,ATM –APL
Process Condition: AP
Maximum Operating Temperature: 1200c
N2 Load Lock: Yes
Wafer Type: 300 SEMI STD-Notch
Qty. of Production Wafers: 120 slots Ladder
Boat Operation: 2 Boat Type
Software Version: AVP 2.7.1 V
System, Furnace
Loading Area Light: White
Force Air Cooling system: installed
Side Maintenance: None
O2 Density control: 0-100ppm
N2 Boat shower wafer cooling: None
Furnace Temperature Controller: SSPC control
System, Wafer/Carrier Handling
Carrier Type: 12" FOUP
Carrier Stage Capacity: 16 FOUP
WTU Type: GenMark
WTU alignment: GenMark
WTU Teaching method: Pre-aligner / dual beam
System, Gas Distribution
IGS Maker / Type: Fujikin- None
IGS MFC Maker / Type: AERA- None
IGS Press Transducer Maker / Type: Mykrolis- None
System, Exhaust Specification
Vacuum Gage - 2 torr: AP tool - None
Vacuum Gage - 10 torr: AP tool - None
Vacuum Gage - 100 torr: AP tool – None
Vacuum Gage - 1000 torr: AP tool – None
Main Valve: AP tool – None
Pump Maker/Model: AP tool – None
Low vacuum valve: AP tool – None
Trap: AP tool – None
Vacuum Pressure Controller: AP tool – None
System, Reactor
Process Tube (LP): None
Outer/Inner Tube Material (LP): None
Inner Tube Type (AP): Quartz Single
Inner T/C: 12FT/HONEYWELL
Boat Materail/Type: Sic
Boat Rotation: None
Pedestal Materail/Type: Quartz
Auto Shutter: installed
System, Power Distribution
Voltage 3phase: 480VAC
Voltage Single-phase: None
Frequency: 60Hz
System, User Interface:
Operation Panel: Keyboard & Screen
Indicator Type: Mouse
Operation software type: Linux
Gas Leak Detector
Gas Leak Detector Materail/Type: GasTech
System, Fixture List, Gas
IGS maintenance Fixture: None
Vacuum Gauge: one
Missing/Damaged Parts List
None report, please inspect tool to reconfirm
Dry pumps not included
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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