Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, G.K. (F15)

Ebara FREX300S Tungsten

Asset ID: 209891

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Ebara

FREX300S Tungsten

Tungsten CMP

CMP Equipment

Equipment details:

Date of Manufacture: 2005. 7

Currently Configured for: To be determined

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 8/26/2022

Full system configuration available: Please ask your sales person.

Photos available: Please ask your sales person.


Part DescriptionDetailed DescriptionQtyMfg Part
Frex 300S4 head 4 platenpolishing system. Dry in Dry out1 
Nova 3090 ReadyInsitu Metrology System0 
Monitor 1 LocationFront of tool1 
Monitor 2 LocationCleaner Side of tool1 
Monitor 3 LocationCart Mounted on Polishing Side of tool1 
Front Light Tower locationLeft Side1 
Rear Light Tower locationRight Side1 
HMIHuman / Machine Interface1Version 8.10
Endpoint Simulation SoftwareME-2012.3.50.1
Simulator Software KeyOne Key supplied1 
NOVA Interface softwareVia File Server0 
WIP Delivery TypeOHT or manual delivery1 
CarrierShinetsu Foup300E(S206) 1 
E84 PI O Sensors and CablesUPPER E84 Sensors & Cables, with E87 compliance1 
E99 Carrier IDSemi ver 0101041 
Docked E99 Reading CapabilityFOUP Reader1 
Frame ConfigurationMetro ready right side of mini-environment0 
Load Port TypesISO PORTASYST3 
Load Port Operator InterfaceStandard1 
Operator Access SwitchYes1 
Platen TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
Platen End pointRECM & Friction1 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryInjecter + HIC1 
Line 150-500ml/min1 
Line 250-500ml/min1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
Platen End pointRECM & Friction0 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryInjecter + HIC1 
Line 150-500ml/min1 
Line 250-500ml/min1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Diamond DR Disc attachment, Screw fixing type1 
Platen End pointRECM & Friction1 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryInjecter + HIC1 
Line 150-500ml/min1 
Line 250-500ml/min1 
Dresser DIW flow meter.Flow meter with user configurable alarm settings.1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Platen TypeCeramic (SiC), 10-150 RPM1 
Platen PadFor shipment only1 
Platen Pad ConditionerScan Dresser, 4.25" Brush Dress, Screw fixing type1 
Platen End pointRECM & Friction0 
Platen Insitu metrologyInsitu metrology0 
Slurry DeliveryInjecter + HIC1 
Line 150-500ml/min1 
Line 250-500ml/min1 
Dresser DIW flow meter.Flow meter1 
Platen Cooling Flow MonitorInstalled on the platen cooling return line.0 
Platen Cooling Temp MonitorTemperature monitor installed on the platen cooling return line.0 
Polisher TechnologySlurry and Pad1 
Polishing Head300mm AI Head Generation 21 
Pad Wafer Loss SensorLaser type1 
Atomizer/Spray BarEbara to provide bracket and atomizer bar.1 
AI head flanges pinsSolid pin1 
Special ChemicalSingle chemical bulk line that will service all modules.1 
Roll Roll Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNozzle1 
Bevel Edge CleaningNo0 
Roll Roll Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNo0 
Bevel Edge CleaningNo0 
Cleaner TypeRoll Brush1 
Chemical 1 Upper Control ValveRecipe settable flow1 
Chemical 1 Lower Control ValveRecipe settable flow1 
Chemical 1 Upper Flow MeterUser configurable alarm settings.1 
Chemical 1 Lower Flow MeterUser configurable alarm settings.1 
Special Chemical UpperNeedle valve1 
Special Chemical LowerNeedle valve1 
Special Chemical UpperFlow Meter with user configurable alarm settings.1 
Special Chemical LowerFlow Meter with user configurable alarm settings.1 
MegasonicNo0 
Bevel Edge CleaningNo0 
Spin Rinse DryerYes1 
FM4910 Compliant> 97% by weight FM 4910 approved materials of construction.1 
EPOTwist to release1 
Safety labelsEnglish1 
Secondary ContainmentAll mechanical connections1 
Installation TypeNot through the wall0 
Seismic supportSeismic support points listed1 
Chemical ConnectionBottom1 
Exhaust ConnectionTop1 
Gas ConnectionBottom1 
Drain ConnectionBottom1 
Bulk Supply RegulationPont of use regulation for special chemical supply line.1 
External PenetrationsBulkhead fitting for inert gas1 
External PenetrationsDual containment for liquids1 
Nova Interface requirementsFunctional interface in include wafer transfer and data exportation to buyer host0 
Operations ManualsCD ROM0 
Maintenance ManualsCD ROM0 
Electrical DiagramsCD ROM0 
Plumbing DiagramsCD ROM0 
OEM parts manualsCD ROM0 
LaserRequired class II documentation1 
Metal Contact CountermeasuresAppropriate covers to reduce possibility of enviromental contamination1 


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