Macquarie Equipment Trading on behalf of Micron Memory Japan, G.K. (F15)

Canon Surpass 320

Asset ID: 204407

Print spec sheet

Canon

Surpass 320

Stripper/Asher

Etch/Ash/Clean - Plasma Processing

Equipment details:

Date of Manufacture: October 9, 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: Currently Available

Tool has been de-installed and is stored in an off-site warehouse.


A HARD DISK DRIVE WILL BE REMOVED FROM TOOL.


[Chamber A]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

CF4(100),H2/N2(2000),

O2(200),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Ceramic

Stage Heater max 300C

Dielectric Substance:Quartz


[Chamber B]

Chamber type:Asher

Gas config. (sccm)=MFC full scale

CF4(100),H2/N2(2000),

O2(200),O2(5000)

MW 2.45GHz, max 5000W

Stage Material:Al + Al2O3

Stage Heater max 300C

Dielectric Substance:Quartz


Other missing or damaged parts: Not reported.

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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