Macquarie Semiconductor and Technology on behalf of Micron Technology Taiwan, Inc. (F11)
Etch/Ash/Clean - Plasma Processing
Date of Manufacture: 2007
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Taoyuan, Taiwan
Available date: Currently Available
Process: STRIP
From original tool PO, please inspect to verify
Main Body
Load Port: Qty 3 Fixed Buffer
System wide corrosion free: Yes(SUS304)
Wafer Breakage Detection:
LCD Monitor: VX1500M-T
System Controller
CPU: Intel Pentium 4
Hard disk: 80GB (Reference)
1st data back-up: 3.5" FDD
2nd data back-up: CD-RW
Operation Monitor: 15" LCD
Signal Tower: PSK 4 color Dual Polemount Type
R.C.S(Remote Control System): PSK
Utility
Main Power: 3ψ 208VAC 60HZ 250A
UPS Power: 1ψ 208VAC 60HZ 63A
Power Vaccine: 1sec
Electric & signal cable Length: 20M
UPS Battery: YES
Circuit Break Type: MCCB Type
Water Manifold valve: Shut off v/v
All Utility Feed Direction: Bottom-up feed
Transfer module
TM ROBOT Body: SANKYO SR8232-0003AAR
TM ROBOT Controller: SANKYO SC3150
TM ROBOT Power box
EFEM ROBOT: SANKYO SR8240-0001AAS
Chamber 1
APC valve: MKS 653B-4-100-2
APC Controller: MKS 651C-26831
Baratron Sensor: MKS 626A02TBE
Pressure Transducer (pirani): MKS 750B13TCD2GG
EPD Controller: NANOTEK NEFL-309S
Heater Module: WATLOW
PICP: 5284-3930020-C-S
Generator: MKS AX7690PSK-04
Gas Box: FUJIKIN IGS Type
Pressure Control: Throttle Valve
Chamber 1 process gas line
GAS #1(O2): 10slm AERA TCFC-PA786CT-BF
GAS #2(N2): 3slm AERA TCFC-PA786CT-BF
GAS #4(NH3): 5slm AERA TCFC-PA786CT-BF
GAS #4(H2N2): 5slm AERA TCFC-PA786CT-BF
Purity: 10RA
MFC Signal: Digital
Gas Line Polishing: Electrical Polished
Regulator
Air Operated Valve: Fujikin
Filter: Millipore
Pressure Transducer: Tem Tech
Chamber 2
APC valve: MKS 653B-4-100-2
APC Controller: MKS 651C-26831
Baratron Sensor: MKS 626A02TBE
Pressure Transducer (pirani): MKS 750B13TCD2GG
EPD Controller: NANOTEK NEFL-309S
Heater Module: WATLOW
PCIP: 5284-3930020-C-S
Generator: MKS AX7690PSK-04
Gas Box: FUJIKIN IGS Type
Pressure Control: Throttle Valve
Chamber 2 process gas line
GAS #1(O2): 10slm AERA TCFC-PA786CT-BF
GAS #2(N2): 3slm AERA TCFC-PA786CT-BF
GAS #4(NH3): 5slm AERA TCFC-PA786CT-BF
GAS #4(H2N2): 5slm AERA TCFC-PA786CT-BF
Purity: 10RA
MFC Signal: Digital
Gas Line Polishing: Electrical Polished
Regulator
Air Operated Valve: Fujikin
Filter: Millipore
Pressure Transducer: Tem Tech
Damage/Missing parts list
Please inspect tool to reconfirm
Dry pumps and customer provided items not included on sales
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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