Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)

Tokyo Electron Ltd. (TEL) Cellesta+

Asset ID: 209624

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Tokyo Electron Ltd. (TEL)

Cellesta+

Single Wafer Processing

Etch/Clean - Wet Processing

Equipment details:

Date of Manufacture: May 2013

Currently Configured for: 300mm

Current Equipment Status: Available

Asset HDD not included

Location of Equipment: Hiroshima, Japan

Available date: 10/15/2022

Missing parts: No missing parts.

Defective parts: Chamber 2 is defective. For more details, please see configuration.


OEM  TEL
Tool Model  CELLESTA Plus
Process  Cylinder etch cleaning
Software Version (include revision #) 3.04.238Nb


System Power Rating  3Φ 200V for CONTLOR EP1
3Φ 200V for HEATER EP2
・1Φ 200V for EXHAUST SENSOR EP3
Loading Configuration  4 LP
   Vendor Chm ModelChemicals / Gases Used (not to use Micron Proprietary names)
Chm/Unit Position   1  LSB(1)DHF 
Chm/Unit Position   2  LSB(2)SC1 
Chm/Unit Position   3  LSU(1) Main body49 HF 
Chm/Unit Position   4  LSU(3) Main body49 HF 


For more details, please see configuration.


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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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