Macquarie Semiconductor and Technology on behalf of Micron Memory Japan, K.K. (F15)
Date of Manufacture: August, 2005
Currently Configured for: 300mm
Current Equipment Status: Available
Asset HDD not included
Location of Equipment: Hiroshima, Japan
Available date: Currently Available
Tool has been de-installed and is currently stored in an off-site warehouse.
Shipping brackets and kits will need to be supplied by the buyer.
A Hard Disk Drive is not included in tool.
BLOCK DIAGRAMS ARE AVAILABLE.
Tool was configured as a Stand Alone system.
[Track Config 1]
COAT cup:2
Developper cup:3
ADH:1
[Track Config 2]
Resist Reduction:RRC
Dev Nozzle:SH?NLD
Resist pump:RDS 10ml,CRD 4ml
[Oven Config]
COT:CPHP x2
DEV:CPHP x2
[Track Chemicals]
Resist supply:Gallon bottle
Thinner:OK73
Other Missing or damaged parts: Not reported.
The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.
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