Macquarie Equipment Trading on behalf of Macquarie Finance Korea Co., Ltd.

Hitachi (Semiconductor) RS-6000

Asset ID: 11758

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Hitachi (Semiconductor)

RS-6000

SEM - Defect Review (DR)

Metrology Equipment

Equipment details:

Date of Manufacture: 25-Jul-14

Currently Configured for: 300mm

Current Equipment Status: Available

Location of Equipment: Gyeonggi-do,, Korea, Republic of

Available date: Currently Available

Model: RS6000E with Options
iPQ Function
A-1 RS6000E VR25 Main System
(300mmWafer Use, AC208V/60Hz) including:
- 2 Wafer Holders(for 300mm)
-  ADR (Auto Defect Review) Function
- 3 Kinds of Image acquiring system
      - SE/Left/Right Image
- Optical Microscope ( for OM alignment)
- 15M Cable Extension (SEM, Controller - Power Supply)
- e-barrier & Preset ABCC function
- New AF & lmage Processing System for VR25
- Super fine lmage system for VR25
- High resolution for 15KV unit
<Std. Options>
A-2 SE-Gun Back-UP Power Supply
A-3 Dry pump lnterface for Edwards lGX
• Dry Pump Main Unit is to be supplied by customer
A-4 Optical Microscope Kit
(Laser Dark Field OM, Color OM)
A-5 ADC (Auto Defect Classification) Unit
A-6 Inspection Function
A-7 Accelerating Voltage to 300V
A-8 High Voltage Power Supply Unit
A-9 Bevel Review Mode 
<Non. Std. Options>
D-1 SK Hynix FA Specifications
1) GEM Communication Function
2) Signal Tower
3) YES Function
<Ordered with an Outside Supplier>
C-1 Foup Opener (Model: TDK TAS300 Qty. 2

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The information referenced on this page is accurate to the best of our knowledge. We do not warrant the completeness or accuracy of the information contained herein. Interested parties are encouraged to request inspection to verify equipment condition, configuration, and completeness. Any offer to purchase equipment shall be subject to our standard terms and conditions of sale.


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